南方科技大学知识苑(SUSTech KC): 基于复合结构的太赫兹调制器的制备及其应用

Title	基于复合结构的太赫兹调制器的制备及其应用
Alternative Title	FABRICATION AND APPLICATION OF TERAHERTZ MODULATORS BASED ON HYBRID STRUCTURE
Author	鲁叶龙
Name pinyin	LU Yelong
School number	12032293
Degree	硕士
Discipline	0856 材料与化工
Subject category of dissertation	0856 材料与化工
Supervisor	刘文权
Mentor unit	中国科学院深圳先进技术研究院
Publication Years	2022-05-13
Submission date	2022-06-25
University	南方科技大学
Place of Publication	深圳
Abstract	作为一个重要的前沿科技领域，太赫兹技术所展现出的波谱特性和应用潜力已受到广泛关注。高性能太赫兹调制器件是太赫兹技术走向实际应用的关键技术之一。近年来，超材料/超表面、石墨烯、二氧化钒和钙钛矿等功能材料为太赫兹调制器件的研发注入了新的动力。然而，当前针对上述材料的复合结构太赫兹调制器件及其应用的研究较少，仍有诸多问题亟待解决。鉴于此，本文设计、加工和测试了三种复合结构太赫兹调制器，分别是光电混合调制硅基超表面、石墨烯/二氧化钒复合薄膜和钙钛矿薄膜复合结构，并将石墨烯/二氧化钒复合薄膜应用于太赫兹单像素成像。太赫兹调制和成像结果验证了设计的有效性和可行性。本文完成的主要工作如下：提出了光电混合调制硅基太赫兹超表面。设计了兼有偶极子共振和电学偏置功能的叉指电极复合结构，并采用阴影掩膜蒸发工艺将此结构蒸镀于硅基底表面，由此制备了太赫兹超表面器件。利用太赫兹时域光谱系统测试了该超表面在不同光激励和偏置电压下的太赫兹响应。实验表明，在光电混合调制下，该超表面的太赫兹透射率随激励光强增大而减小，但随偏置电压的升高而增大。这可能是电极附近的电场对硅基底光生载流子的局域调节所致。这种双向调制特性有望用于复杂的太赫兹波传输调控。提出了石墨烯/二氧化钒复合薄膜太赫兹光控调制器。通过磁溅射法制备了二氧化钒薄膜，并采用湿法转移把单层石墨烯转移至该薄膜上进行复合。实验表明，与二氧化钒薄膜相比，该复合薄膜的调制性能提高了80%。进一步地，将其应用于太赫兹单像素成像。结果显示，基于该复合薄膜的成像信噪比提升了近20%。初步探索了钙钛矿超表面太赫兹调制器。采用一步溶液旋涂法制备了钙钛矿薄膜，并将其与超表面进行复合。实验显示，在光电混合调制下，该复合结构对太赫兹波也具有双向调控作用。
Keywords	太赫兹波功能器件调制器单像素成像
Language	Chinese
Training classes	独立培养
Enrollment Year	2020
Year of Degree Awarded	2022-05
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Academic Degree Assessment Sub committee	中国科学院深圳理工大学（筹）联合培养
Domestic book classification number	TN761
Data Source	人工提交
Document Type	Thesis
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/342777
Department	Shenzhen Institute of Advanced Technology Chinese Academy of Sciences
Recommended Citation GB/T 7714	鲁叶龙. 基于复合结构的太赫兹调制器的制备及其应用[D]. 深圳. 南方科技大学,2022.

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