中文版 | English
Title

Research progress of electromechanical graphene resonant sensors br

Author
Corresponding AuthorLi Cheng; Song Xue-Feng
Publication Years
2022-06-20
DOI
Source Title
ISSN
1000-3290
Volume71Issue:12
Abstract
The resonant sensor is a kind of high-sensitivity and high-stability sensor that directly outputs digitalsignals. The resonance sensitive elements of traditional resonant sensors are mostly made of metal, quartzcrystal, silicon and other materials. However, with the development of resonant sensor toward theminiaturization and intellectualization, the sensitive materials of new resonator are micro-nano machined andhighly sensitive. As a new type of two-dimensional nanomaterial, graphene has the great potentials in the fieldof resonance sensing because of its excellent mechanical, electrical, optical and thermal properties. Therefore,the mechanical quantity sensor based on graphene material is expected to surpass the silicon materialmechanical quantity sensor in many aspects such as micro-nano size, high performance, and environmentaladaptability. This review focuses on the graphene resonant mechanical quantity sensor. In the first part, wesummarize the basic properties, preparation methods, and transfer methods of graphene materials. Thepreparation and transmission methods of graphene are key to high-performance graphene resonator, but thereare still different problems in the preparation and transfer of graphene, which also greatly restricts thedevelopment of graphene resonator. In the second part, the basic theory of resonant sensors is given, and thecommon methods of transferring graphene films are introduced in detail. Then the theoretical and experimental studies of graphene resonator are discussed. For example, the theoretical studies of graphene resonator areinvestigated by using the classical elastic theory, non-local elastic theory, molecular structure mechanics andmolecular dynamics. Then the effects of graphene preparation method, graphene layer number and shape,excitation and detection methods on the resonance performance are estimated in the resonant experiments ofgraphene resonators. After that, the research progress of graphene resonator is summarized in the fields ofpressure, acceleration and mass sensors. Compared with traditional silicon resonators, graphene resonators havea small dimension and demonstrate preferable resonant performance under low-temperature and low-pressureconditions. In this case, the technical issues of graphene resonant sensor are introduced to emphasize theimportance of suspended graphene film transfer, structure fabrication of harmonic oscillator and vibrationexcitation/detection of resonators, which contributes to the potential applications in the fields of aerospace,intelligent detection and biomedical sensing for graphene resonant sensors
Keywords
URL[Source Record]
Indexed By
SCI ; EI
Language
English
SUSTech Authorship
Corresponding
Funding Project
National Natural Science Foundation of China[62173021] ; Beijing Natural Science Foundation, China[4212039] ; Aviation Science Foundation of China[2020Z073051002] ; Science Technology and Innovation Commission of Shenzhen Municipality, China[JCYJ20180504165721952]
WOS Research Area
Physics
WOS Subject
Physics, Multidisciplinary
WOS Accession No
WOS:000820163500012
Publisher
ESI Research Field
PHYSICS
Data Source
Web of Science
Citation statistics
Cited Times [WOS]:0
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/355847
DepartmentInstitute for Quantum Science and Engineering
Affiliation
1.Beihang Univ, Sch Instrumentat & Optoelect Engn, Beijing 100191, Peoples R China
2.Beihang Univ Shenzhen, Emerging Ind Technol Res Inst, Shenzhen 518057, Peoples R China
3.Southern Univ Sci & Technol, Inst Quantum Sci & Engn, Shenzhen 518055, Peoples R China
Corresponding Author AffilicationInstitute for Quantum Science and Engineering
Recommended Citation
GB/T 7714
Wan Zhen,Li Cheng,Liu Yu-Jian,et al. Research progress of electromechanical graphene resonant sensors br[J]. ACTA PHYSICA SINICA,2022,71(12).
APA
Wan Zhen,Li Cheng,Liu Yu-Jian,Song Xue-Feng,&Fan Shang-Chun.(2022).Research progress of electromechanical graphene resonant sensors br.ACTA PHYSICA SINICA,71(12).
MLA
Wan Zhen,et al."Research progress of electromechanical graphene resonant sensors br".ACTA PHYSICA SINICA 71.12(2022).
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