Effect of the diluent on combustion synthesis of silicon nitride
|Corresponding Author||Cui，Wei; Liu，Guanghua|
SiN powders were prepared by combustion synthesis with 1- and 3-μm α-SiN, β-SiN diluent and BN inert diluent. The maximum temperatures of samples with boron nitride (BN) as a diluent are about 1500–1600°C lower than that of samples with α-SiN and β-SiN as diluents are about 1600–1800°C. Moreover, the newly formed α-SiN contents in the synthesized products with BN as diluent over 90 wt% are much higher than those with α-SiN and β-SiN as diluent about 20–40 wt%. The strip-like α-SiN, rod-like β-SiN grains, and radiative shaped grains can be observed in the synthesized products. Finally, the effect of the diluent on the α-phase content of combustion synthesized SiN is discussed, which provides key guidance for preparing SiN powders with high α-phase content.
National Natural Science Foundation of China[
|WOS Research Area|
Materials Science, Ceramics
|WOS Accession No|
|EI Accession Number|
Boron Nitride ; III-V Semiconductors ; Powders ; Silicon Nitride
|ESI Classification Code|
Process Heating:642.1 ; Semiconducting Materials:712.1 ; Chemical Reactions:802.2 ; Inorganic Compounds:804.2
Cited Times [WOS]:0
|Document Type||Journal Article|
|Department||SUSTech Institute of Microelectronics|
1.State Key Laboratory of New Ceramics and Fine Processing,School of Materials Science and Engineering,Tsinghua University,Beijing,China
2.Foshan (Southern China) Institute for New Materials,Foshan,Guangdong,China
3.School of Microelectronics,Southern University of Science and Technology,Shenzhen,China
Li，Fei,Cui，Wei,Tian，Zhaobo,et al. Effect of the diluent on combustion synthesis of silicon nitride[J]. International Journal of Applied Ceramic Technology,2022.
Li，Fei.,Cui，Wei.,Tian，Zhaobo.,Zhang，Jie.,Du，Songmo.,...&Liu，Guanghua.(2022).Effect of the diluent on combustion synthesis of silicon nitride.International Journal of Applied Ceramic Technology.
Li，Fei,et al."Effect of the diluent on combustion synthesis of silicon nitride".International Journal of Applied Ceramic Technology (2022).
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