Elimination of Nanorods by Tetramethylammonium Hydroxide for the Fabrication of AlGaN-based UV-C Micro-LED Array

Feng，Feng1; Liu，Yibo1; Zhang，Ke1; Chan，Ka Wah1; Liu，Zhaojun2; Kwok，Hoi Sing1

10.1002/sdtp.15754

2022

0097-966X

2168-0159

Digest of Technical Papers - SID International Symposium

53

1

1324-1327

Short-wavelength ultraviolet (UV-C) micro light-emitting diode (Micro-LED) array greatly benefits the optogenetic applications in neuroscience, optical communications, and maskless lithography. In this work, UV-C Micro-LED arrays with each pixel size of 10×10 μm were fabricated, and the nanorods introduced by inductively coupled plasma (ICP) etching were eliminated by post-ICP tetramethylammonium hydroxide (TMAH) treatment. The pixel-level electrical characteristics were analyzed, and the peak wavelength stability under variable injected current densities was demonstrated. The results indicated the potential of applying the TMAH treatment in the fabrication of the UV-C Micro-LED array.

AlGaN Array Micro-LED UV-C

Others

English

EI

20223312556983

Aluminum gallium nitride ; Etching ; Fabrication ; III-V semiconductors ; Inductively coupled plasma ; Nanorods ; Optical communication ; Pixels

Semiconducting Materials:712.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Optical Communication Systems:717.1 ; Nanotechnology:761 ; Chemical Reactions:802.2 ; Inorganic Compounds:804.2 ; Plasma Physics:932.3 ; Solid State Physics:933

2-s2.0-85135635420

Scopus

1.State Key Laboratory of Advanced Displays and Optoelectronics Technologies,Hong Kong University of Science and Technology,Hong Kong
2.Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Hong Kong

Feng，Feng,Liu，Yibo,Zhang，Ke,et al. Elimination of Nanorods by Tetramethylammonium Hydroxide for the Fabrication of AlGaN-based UV-C Micro-LED Array[C],2022:1324-1327.