Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters

Li, Mingjie; Luo, Anxin; Luo, Wenxin; Wang, Fei

2022-08-01

10.1109/JMEMS.2022.3194859

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   Impact Factor & Quartile

1057-7157

1941-0158

In recent years, self-powered energy harvesting technology has been widely studied, which may provide supplementary power for wireless sensing networks with low power consumptions. The energy harvester could reduce the use of conventional power supply of batteries, and even eliminate the challenge of battery replacement for large scale networks. In this review, the fundamentals and theories of energy conversion from mechanical vibration to electrical current via variable capacitor are introduced, followed by the discussion of frequency bandwidth broadening, structural parameters, such as surface potential, initial air gap, and stopper heights, as the aspects for controlling squeeze-film air damping force and the output power. Representative examples of the design optimizations of vacuum operating pressure and perforated holes on bottom electrode are presented. Also, special electret processing and built-in corona needles for enhanced space charge stability and self-recharging capability are briefed. This review can provide the research community with a better understanding of the MEMS-compatible electrostatic vibration energy harvester, and further facilitate its development for future potential applications. 2022-0089

Vibrations Electrets Electrodes Electrostatics Capacitance Force Damping Energy harvester microelectromechanical systems (MEMS) electrets air damping pull-in effect

SCI ; EI

English

First ; Corresponding

National Science Foundation of China[62174077] ; Shenzhen Science and Technology Innovation Committee["JCYJ20200109105838951","K21799109","K21799110"]

Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics

Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied

WOS:000842053400001

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

20223512676972

Dissociation ; Electrets ; Electric power systems ; Electrodes ; Electromechanical devices ; Electrostatic generators ; Electrostatics ; Energy harvesting ; Low power electronics ; MEMS ; Secondary batteries ; Vibrations (mechanical)

Energy Conversion Issues:525.5 ; Electricity: Basic Concepts and Phenomena:701.1 ; Secondary Batteries:702.1.2 ; Electric Equipment:704.2 ; Electric Power Systems:706.1 ; Dielectric Materials:708.1 ; Chemical Reactions:802.2 ; Mechanics:931.1

ENGINEERING

Web of Science

Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China

Li, Mingjie,Luo, Anxin,Luo, Wenxin,et al. Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2022,PP(99):1-15.

Li, Mingjie,Luo, Anxin,Luo, Wenxin,&Wang, Fei.(2022).Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,PP(99),1-15.

Li, Mingjie,et al."Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS PP.99(2022):1-15.