| Title | Surface metrology by multiple-wavelength coherent modulation imaging |
| Author | |
| Corresponding Author | Zhang, Fucai |
| Publication Years | 2022-08-20
|
| DOI | |
| Source Title | |
| ISSN | 1559-128X
|
| EISSN | 2155-3165
|
| Volume | 61Issue:24Pages:7218-7224 |
| Abstract | With the rapid progress of advanced manufacturing, three-dimensional metrology techniques that are able to achieve nanometer spatial resolution and to capture fast dynamics are highly desired, for which a snapshot ability and a common-light-path setup are required. Commonly used off-axis holography and phase-shifting interferometry are short in fulfilling those requirements. We studied the suitability and performance of the coherent modulation imaging (CMI) method for metrology applications. Both transparent and reflective samples are measured in visible light experiments. Thanks to its ability to retrieve separate wavefronts at different wavelengths from a single measurement, CMI allows for attaining an enlarged range of measurement free from phase wrapping by utilizing the concept of synthetic wavelength. The CMI method fulfills well the requirements for advanced metrology and can be implemented at any wavelength. We expect it would be a powerful addition to the pool of advanced metrology tools. (C) 2022 Optica Publishing Group |
| URL | [Source Record] |
| Indexed By | |
| Language | English
|
| SUSTech Authorship | Corresponding
|
| Funding Project | Shenzhen Key Laboratory of Robotics Perception and Intelligence[ZDSYS20200810171800001]
; National Natural Science Foundation of China["11775105","12074167"]
; Shenzhen Science and Technology Program[KQTD20170810110313773]
; Centers for Mechanical Engineering Research and Education at MIT and SUSTech[6941806]
|
| WOS Research Area | Optics
|
| WOS Subject | Optics
|
| WOS Accession No | WOS:000843576700033
|
| Publisher | |
| EI Accession Number | 20223712737075
|
| EI Keywords | Holography
; Light
|
| ESI Classification Code | Light/Optics:741.1
; Holography:743
; Imaging Techniques:746
|
| ESI Research Field | PHYSICS
|
| Data Source | Web of Science
|
| Citation statistics |
Cited Times [WOS]:0
|
| Document Type | Journal Article |
| Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/394243 |
| Department | Department of Electrical and Electronic Engineering |
| Affiliation | 1.Southern Univ Sci & Technol, Shenzhen Key Lab Robot Percept & Intelligence, Shenzhen 518055, Peoples R China 2.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China |
| Corresponding Author Affilication | Southern University of Science and Technology |
| Recommended Citation GB/T 7714 |
Yi, Jianji,Zhao, Jiangtao,Wang, Bingyang,et al. Surface metrology by multiple-wavelength coherent modulation imaging[J]. APPLIED OPTICS,2022,61(24):7218-7224.
|
| APA |
Yi, Jianji,Zhao, Jiangtao,Wang, Bingyang,Wang, Yanfang,&Zhang, Fucai.(2022).Surface metrology by multiple-wavelength coherent modulation imaging.APPLIED OPTICS,61(24),7218-7224.
|
| MLA |
Yi, Jianji,et al."Surface metrology by multiple-wavelength coherent modulation imaging".APPLIED OPTICS 61.24(2022):7218-7224.
|
| Files in This Item: | There are no files associated with this item. | |||||
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