Title | Transparent conductive electrode based on hydrogen doped zinc oxide for OLED application |
Author | |
DOI | |
Publication Years | 2015
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ISSN | 0097-966X
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EISSN | 2168-0159
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Source Title | |
Volume | 46
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Abstract | A transparent and conductive electrode based on hydrogen (H) doped ZnO has been proposed for active-matrix (AM) display applications. With optimal H plasma power and treat time, the resultant ZnO:H exhibits a low sheet resistance of 200 ohm/sq at a thickness of 150 nm. The demonstrated transparent and conductive ZnO:H can serve as electrode for LCD or OLED as well as S/D electrode for ZnO TFT. With proposed ZnO:H electrode, two photomask steps can be reduced in the fabrication of ZnO TFT-based AM backplanes. |
SUSTech Authorship | First
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Language | English
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URL | [Source Record] |
Funding Project | National Natural Science Foundation of China[61405089];
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Scopus EID | 2-s2.0-85018401475
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Data Source | Scopus
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Citation statistics |
Cited Times [WOS]:0
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Document Type | Conference paper |
Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/395672 |
Department | Department of Electrical and Electronic Engineering |
Affiliation | Department of Electrical and Electronic Engineering,South University of Science and Technology of China,Shenzhen,518055,China |
First Author Affilication | Department of Electrical and Electronic Engineering |
First Author's First Affilication | Department of Electrical and Electronic Engineering |
Recommended Citation GB/T 7714 |
Chen,Shuming,Wang,Sisi. Transparent conductive electrode based on hydrogen doped zinc oxide for OLED application[C],2015.
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