中文版 | English
Title

Transparent conductive electrode based on hydrogen doped zinc oxide for OLED application

Author
DOI
Publication Years
2015
ISSN
0097-966X
EISSN
2168-0159
Source Title
Volume
46
Abstract
A transparent and conductive electrode based on hydrogen (H) doped ZnO has been proposed for active-matrix (AM) display applications. With optimal H plasma power and treat time, the resultant ZnO:H exhibits a low sheet resistance of 200 ohm/sq at a thickness of 150 nm. The demonstrated transparent and conductive ZnO:H can serve as electrode for LCD or OLED as well as S/D electrode for ZnO TFT. With proposed ZnO:H electrode, two photomask steps can be reduced in the fabrication of ZnO TFT-based AM backplanes.
SUSTech Authorship
First
Language
English
URL[Source Record]
Funding Project
National Natural Science Foundation of China[61405089];
Scopus EID
2-s2.0-85018401475
Data Source
Scopus
Citation statistics
Cited Times [WOS]:0
Document TypeConference paper
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/395672
DepartmentDepartment of Electrical and Electronic Engineering
Affiliation
Department of Electrical and Electronic Engineering,South University of Science and Technology of China,Shenzhen,518055,China
First Author AffilicationDepartment of Electrical and Electronic Engineering
First Author's First AffilicationDepartment of Electrical and Electronic Engineering
Recommended Citation
GB/T 7714
Chen,Shuming,Wang,Sisi. Transparent conductive electrode based on hydrogen doped zinc oxide for OLED application[C],2015.
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