Transparent conductive electrode based on hydrogen doped zinc oxide for OLED application
A transparent and conductive electrode based on hydrogen (H) doped ZnO has been proposed for active-matrix (AM) display applications. With optimal H plasma power and treat time, the resultant ZnO:H exhibits a low sheet resistance of 200 ohm/sq at a thickness of 150 nm. The demonstrated transparent and conductive ZnO:H can serve as electrode for LCD or OLED as well as S/D electrode for ZnO TFT. With proposed ZnO:H electrode, two photomask steps can be reduced in the fabrication of ZnO TFT-based AM backplanes.
National Natural Science Foundation of China;
Cited Times [WOS]:0
|Document Type||Conference paper|
|Department||Department of Electrical and Electronic Engineering|
Department of Electrical and Electronic Engineering,South University of Science and Technology of China,Shenzhen,518055,China
|First Author Affilication||Department of Electrical and Electronic Engineering|
|First Author's First Affilication||Department of Electrical and Electronic Engineering|
Chen，Shuming,Wang，Sisi. Transparent conductive electrode based on hydrogen doped zinc oxide for OLED application[C],2015.
|Files in This Item:||There are no files associated with this item.|
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