| Title | Polymeric sidewall transfer lithography |
| Author | |
| Corresponding Author | Lo, Yi-Chen |
| Publication Years | 2022-09-01
|
| DOI | |
| Source Title | |
| ISSN | 2399-6528
|
| Volume | 6Issue:9 |
| Abstract | This work is to demonstrate a low cost and time-conserving technique to create nano-trenches by transferring nano-scale polymeric sidewalls into substrate. The polymeric sidewall is a vertically spreading layer deposited by spin-coating a polymer solution on a vertical template. By varying processing parameters such as the solution concentration or the spin-coating speed, the dimension of the sidewall can be changed, which, after pattern transfer, also changes the nano-trench dimension. In this work, high-resolution trenches of about 15 nm have been achieved after transferring straight line sidewalls into substrate. Other than straight line sidewall patterns, this method also fabricates ring-shaped patterns including circles, squares, and concentric squares. With various shapes of sidewall patterns, this technique has a potential to implement other practical applications such as fabricating high-resolution nanoimprint molds of 15 nm. |
| Keywords | |
| URL | [Source Record] |
| Indexed By | |
| Language | English
|
| SUSTech Authorship | Others
|
| Funding Project | National Science Foundation[1054137]
|
| WOS Research Area | Physics
|
| WOS Subject | Physics, Multidisciplinary
|
| WOS Accession No | WOS:000854328700001
|
| Publisher | |
| Data Source | Web of Science
|
| Citation statistics |
Cited Times [WOS]:0
|
| Document Type | Journal Article |
| Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/402359 |
| Department | Department of Materials Science and Engineering |
| Affiliation | 1.Texas A&M Univ, Dept Elect & Comp Engn, College Stn, TX 77843 USA 2.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen 518055, Guangdong, Peoples R China |
| Recommended Citation GB/T 7714 |
Lo, Yi-Chen,Cheng, Xing. Polymeric sidewall transfer lithography[J]. Journal of Physics Communications,2022,6(9).
|
| APA |
Lo, Yi-Chen,&Cheng, Xing.(2022).Polymeric sidewall transfer lithography.Journal of Physics Communications,6(9).
|
| MLA |
Lo, Yi-Chen,et al."Polymeric sidewall transfer lithography".Journal of Physics Communications 6.9(2022).
|
| Files in This Item: | There are no files associated with this item. | |||||
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