High-spatial-resolution composition analysis of micro/nano-structures with a nanoscale compositional variation

Wang, Meng1,2,3,4; Wang, Xiaofeng1,2; Zhou, Zhican1,2,3; Xia, Feng3,6; Zhang, Haoran1,2,10; Shelaev, Artem7,8; Zhang, Xinzheng3; Guo, Chuanfei5,9; Xu, Jingjun3; Liu, Qian1,2,3

2022-09-01

10.1007/s12274-022-4648-0

Nano Research   Impact Factor & Quartile

1998-0124

1998-0000

The composition of materials in a micro-/nano-devices plays a key role in determining their mechanical, physical, and chemical properties. Especially, for devices with a compositional change on nanoscale which can often be achieved by point-by-point direct writing technology using a focused ion beam (FIB), electron beam (EB), or laser beam (LB), but so far, nanoscale composition analysis of a large-area micro/nano structures with a variation composition remains a big challenge in cost, simpleness, and flexibility. Here we present a feasible route to realize large-area composition analysis with nanoscale spatial resolution by using Raman spectroscopy. We experimentally verified the capability of this method by analyzing a complex Sn-SnOx system of a microscale grayscale mask with nanoscale spatial resolution of composition. Further analyses using Auger electron spectroscopy, transmission electron microscopy, and atomic force microscopy indicated the effectiveness and practicality of our method. This work opens up a way to analyze the composition of a large-area complex system at a nanoscale spatial resolution, and the method can be extended to many other material systems.

Raman spectroscopy nanoscale resolution composition analysis large-area

SCI

English

Corresponding

National Natural Science Foundation of China["51971070","10974037"] ; national Key Research and Development Program of China[2016YFA0200403] ; CAS Strategy Pilot Program[XDA 09020300] ; Eu-FP7 Project[247644] ; Guangdong Provincial Key Laboratory Program from the Department of Science and Technology of Guangdong Province[2021B1212040001] ; NSFC[61805156]

Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics

Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied

WOS:000854851900003

TSINGHUA UNIV PRESS

Web of Science

1.Natl Ctr Nanosci & Technol, Chinese Acad Sci CAS Key Lab Nanosyst & Hierarch, CAS Ctr Excellence Nanosci, Beijing 100190, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100190, Peoples R China
3.Nankai Univ, TEDA Appl Phys Sch, MOE Key Lab Weak Light Nonlinear Photon, Tianjin 300457, Peoples R China
4.Shenzhen Technol Univ, Sino German Coll Intelligent Mfg, Shenzhen 518118, Peoples R China
5.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen 518055, Peoples R China
6.Qingdao Univ, Coll Phys, Qingdao 26607, Peoples R China
7.NT MDT Co, Bldg 100, Moscow 124482, Russia
8.Kazan Fed Univ, Inst Phys, Kazan 420008, Russia
9.Southern Univ Sci & Technol, Guangdong Prov Key Lab Funct Oxide Mat & Devices, Shenzhen 518055, Peoples R China
10.Nanjing Univ Aeronaut & Astronaut, Coll Mat Sci & Technol, Nanjing 210016, Peoples R China

Wang, Meng,Wang, Xiaofeng,Zhou, Zhican,et al. High-spatial-resolution composition analysis of micro/nano-structures with a nanoscale compositional variation[J]. Nano Research,2022.

Wang, Meng.,Wang, Xiaofeng.,Zhou, Zhican.,Xia, Feng.,Zhang, Haoran.,...&Liu, Qian.(2022).High-spatial-resolution composition analysis of micro/nano-structures with a nanoscale compositional variation.Nano Research.

Wang, Meng,et al."High-spatial-resolution composition analysis of micro/nano-structures with a nanoscale compositional variation".Nano Research (2022).