南方科技大学知识苑(SUSTech KC): Wafer-Level Patterning of SnO<sub>2</sub> Nanosheets for MEMS Gas Sensors

Title	Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors
Author	Li，Mingjie; Luo，Wenxin; Liu，Xiaojiang; Niu，Gaoqiang; Wang，Fei
Publication Years	2022
DOI	10.1109/LED.2022.3204292
Source Title	IEEE ELECTRON DEVICE LETTERS Impact Factor & Quartile
ISSN	0741-3106
EISSN	1558-0563
Volume	PP Issue:99Pages:1-1
Abstract	In the past few decades, gas sensitive nanomaterials are usually deposited on specific area of the wafer by drop-casting or inkjet printing for application in gas sensor fabrication. However, wafer-level patterning of sensing materials with satisfactory reproducibility still encounters challenge. In this letter, we propose a facile ’top-down’ strategy to manufacture wafer-scale gas sensing chips with high-throughput by photolithography using a well-mixed photoresist-nanomaterial suspension, followed by calcination. The fabricated gas sensors based on the proposed approach yield excellent reproducibility and uniformity of sensing response to ethanol detection with a relative standard deviation (RSD) < 4.5 %, suggesting promising application for high-volume production of MEMS compatible gas sensors.
Keywords	Ethanol ethanol sensors Fabrication Gas detectors MEMS technology Micromechanical devices patterning Resists Sensors SnO₂ nanosheets Temperature sensors
URL	[Source Record]
Indexed By	EI
Language	English
SUSTech Authorship	First
EI Accession Number	20223812755497
EI Keywords	Chemical detection ; Chemical sensors ; Fabrication ; Gas detectors ; Gas sensing electrodes ; Gases ; Nanosheets ; Nanostructured materials ; Photoresists
ESI Classification Code	Semiconductor Devices and Integrated Circuits:714.2 ; Nanotechnology:761 ; Chemistry:801 ; Organic Compounds:804.1 ; Coating Materials:813.2 ; Accidents and Accident Prevention:914.1 ; Solid State Physics:933 ; Crystalline Solids:933.1 ; Special Purpose Instruments:943.3
ESI Research Field	ENGINEERING
Scopus EID	2-s2.0-85137894798
Data Source	Scopus
PDF url	https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9877900
Citation statistics	Cited Times [WOS]:5
Document Type	Journal Article
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/402405
Department	SUSTech Institute of Microelectronics
Affiliation	School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
First Author Affilication	SUSTech Institute of Microelectronics
First Author's First Affilication	SUSTech Institute of Microelectronics
Recommended Citation GB/T 7714	Li，Mingjie,Luo，Wenxin,Liu，Xiaojiang,et al. Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors[J]. IEEE ELECTRON DEVICE LETTERS,2022,PP(99):1-1.
APA	Li，Mingjie,Luo，Wenxin,Liu，Xiaojiang,Niu，Gaoqiang,&Wang，Fei.(2022).Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors.IEEE ELECTRON DEVICE LETTERS,PP(99),1-1.
MLA	Li，Mingjie,et al."Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors".IEEE ELECTRON DEVICE LETTERS PP.99(2022):1-1.

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Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors

Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors