中文版 | English
Title

Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors

Author
Publication Years
2022
DOI
Source Title
ISSN
0741-3106
EISSN
1558-0563
VolumePPIssue:99Pages:1-1
Abstract
In the past few decades, gas sensitive nanomaterials are usually deposited on specific area of the wafer by drop-casting or inkjet printing for application in gas sensor fabrication. However, wafer-level patterning of sensing materials with satisfactory reproducibility still encounters challenge. In this letter, we propose a facile ’top-down’ strategy to manufacture wafer-scale gas sensing chips with high-throughput by photolithography using a well-mixed photoresist-nanomaterial suspension, followed by calcination. The fabricated gas sensors based on the proposed approach yield excellent reproducibility and uniformity of sensing response to ethanol detection with a relative standard deviation (RSD) < 4.5 %, suggesting promising application for high-volume production of MEMS compatible gas sensors.
Keywords
URL[Source Record]
Indexed By
Language
English
SUSTech Authorship
First
EI Accession Number
20223812755497
EI Keywords
Chemical detection ; Chemical sensors ; Fabrication ; Gas detectors ; Gas sensing electrodes ; Gases ; Nanosheets ; Nanostructured materials ; Photoresists
ESI Classification Code
Semiconductor Devices and Integrated Circuits:714.2 ; Nanotechnology:761 ; Chemistry:801 ; Organic Compounds:804.1 ; Coating Materials:813.2 ; Accidents and Accident Prevention:914.1 ; Solid State Physics:933 ; Crystalline Solids:933.1 ; Special Purpose Instruments:943.3
ESI Research Field
ENGINEERING
Scopus EID
2-s2.0-85137894798
Data Source
Scopus
PDF urlhttps://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9877900
Citation statistics
Cited Times [WOS]:6
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/402405
DepartmentSUSTech Institute of Microelectronics
Affiliation
School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
First Author AffilicationSUSTech Institute of Microelectronics
First Author's First AffilicationSUSTech Institute of Microelectronics
Recommended Citation
GB/T 7714
Li,Mingjie,Luo,Wenxin,Liu,Xiaojiang,et al. Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors[J]. IEEE ELECTRON DEVICE LETTERS,2022,PP(99):1-1.
APA
Li,Mingjie,Luo,Wenxin,Liu,Xiaojiang,Niu,Gaoqiang,&Wang,Fei.(2022).Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors.IEEE ELECTRON DEVICE LETTERS,PP(99),1-1.
MLA
Li,Mingjie,et al."Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors".IEEE ELECTRON DEVICE LETTERS PP.99(2022):1-1.
Files in This Item:
There are no files associated with this item.
Related Services
Fulltext link
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Export to Excel
Export to Csv
Altmetrics Score
Google Scholar
Similar articles in Google Scholar
[Li,Mingjie]'s Articles
[Luo,Wenxin]'s Articles
[Liu,Xiaojiang]'s Articles
Baidu Scholar
Similar articles in Baidu Scholar
[Li,Mingjie]'s Articles
[Luo,Wenxin]'s Articles
[Liu,Xiaojiang]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Li,Mingjie]'s Articles
[Luo,Wenxin]'s Articles
[Liu,Xiaojiang]'s Articles
Terms of Use
No data!
Social Bookmark/Share
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.