Title | Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors |
Author | |
Publication Years | 2022
|
DOI | |
Source Title | |
ISSN | 0741-3106
|
EISSN | 1558-0563
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Volume | PPIssue:99Pages:1-1 |
Abstract | In the past few decades, gas sensitive nanomaterials are usually deposited on specific area of the wafer by drop-casting or inkjet printing for application in gas sensor fabrication. However, wafer-level patterning of sensing materials with satisfactory reproducibility still encounters challenge. In this letter, we propose a facile ’top-down’ strategy to manufacture wafer-scale gas sensing chips with high-throughput by photolithography using a well-mixed photoresist-nanomaterial suspension, followed by calcination. The fabricated gas sensors based on the proposed approach yield excellent reproducibility and uniformity of sensing response to ethanol detection with a relative standard deviation (RSD) < 4.5 %, suggesting promising application for high-volume production of MEMS compatible gas sensors. |
Keywords | |
URL | [Source Record] |
Indexed By | |
Language | English
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SUSTech Authorship | First
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EI Accession Number | 20223812755497
|
EI Keywords | Chemical detection
; Chemical sensors
; Fabrication
; Gas detectors
; Gas sensing electrodes
; Gases
; Nanosheets
; Nanostructured materials
; Photoresists
|
ESI Classification Code | Semiconductor Devices and Integrated Circuits:714.2
; Nanotechnology:761
; Chemistry:801
; Organic Compounds:804.1
; Coating Materials:813.2
; Accidents and Accident Prevention:914.1
; Solid State Physics:933
; Crystalline Solids:933.1
; Special Purpose Instruments:943.3
|
ESI Research Field | ENGINEERING
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Scopus EID | 2-s2.0-85137894798
|
Data Source | Scopus
|
PDF url | https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9877900 |
Citation statistics |
Cited Times [WOS]:5
|
Document Type | Journal Article |
Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/402405 |
Department | SUSTech Institute of Microelectronics |
Affiliation | School of Microelectronics, Southern University of Science and Technology, Shenzhen, China |
First Author Affilication | SUSTech Institute of Microelectronics |
First Author's First Affilication | SUSTech Institute of Microelectronics |
Recommended Citation GB/T 7714 |
Li,Mingjie,Luo,Wenxin,Liu,Xiaojiang,et al. Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors[J]. IEEE ELECTRON DEVICE LETTERS,2022,PP(99):1-1.
|
APA |
Li,Mingjie,Luo,Wenxin,Liu,Xiaojiang,Niu,Gaoqiang,&Wang,Fei.(2022).Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors.IEEE ELECTRON DEVICE LETTERS,PP(99),1-1.
|
MLA |
Li,Mingjie,et al."Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors".IEEE ELECTRON DEVICE LETTERS PP.99(2022):1-1.
|
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