中文版 | English
Title

Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS

Author
Corresponding AuthorMei,Haijuan; Gong,Weiping; Ren,Fuzeng
Publication Years
2022
DOI
Source Title
ISSN
0272-8842
EISSN
1873-3956
Volume49Issue:1
Abstract
Due to its excellent lubricity and immiscibility with nitride phase, Cu has been added to nitrides to form a typical nanomultilayer structure. In this work, a hybrid deposition of AIP and PDCMS was applied to synthesize the multilayered AlTiN/Cu coatings, and the relationship between microstructure and mechanical properties was explored. The Cu-free AlTiN coating exhibited a c-TiAlN phase with a strong (200) preferred orientation. After adding Cu layer, the microstructure changed from a dense columnar structure into a featureless structure and then a fine-grained structure. As the Cu layer thickness reached 5.1 nm, the AlTiN/Cu(18.4 at.%) coating showed a double-phase of c-TiAlN and c-Cu. The thickness modulation period of Cu/AlTiN sublayer exhibited an excellent linear relationship with the content ratio of Cu/(Al + Ti). After adding Cu, the ion bombardment effect was weakened, the AlTiN/Cu(2.9 at.%) coating exhibited the lowest surface roughness of 18.9 nm, and the hardness gradually decreased from 34.6 to 13.2 GPa, accompanied by a relaxation of residual stress. Due to a high H/E* ratio, a maximum adhesion strength of 83.0 N was obtained at 2.9 at.% Cu.
Keywords
URL[Source Record]
Indexed By
EI ; SCI
Language
English
SUSTech Authorship
Corresponding
Funding Project
Basic and Applied Basic Research Foundation of Guangdong Province[2020A1515110016];Huizhou University[2020JB010];Department of Education of Guangdong Province[2021KQNCX091];National Natural Science Foundation of China[51672100];National Natural Science Foundation of China[51875109];Huizhou University[HZU202005];Huizhou University[IRTHZU];
WOS Research Area
Materials Science
WOS Subject
Materials Science, Ceramics
WOS Accession No
WOS:000931979300024
Publisher
EI Accession Number
20223712734916
EI Keywords
Aluminum compounds ; Coatings ; Copper compounds ; Hybrid systems ; Ion bombardment ; Silicon compounds ; Surface roughness ; Titanium nitride
ESI Classification Code
Inorganic Compounds:804.2 ; Coating Materials:813.2 ; Mathematics:921 ; Physical Properties of Gases, Liquids and Solids:931.2 ; High Energy Physics:932.1 ; Materials Science:951
ESI Research Field
MATERIALS SCIENCE
Scopus EID
2-s2.0-85137723319
Data Source
Scopus
Citation statistics
Cited Times [WOS]:0
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/402413
DepartmentDepartment of Materials Science and Engineering
Affiliation
1.Guangdong Provincial Key Laboratory of Electronic Functional Materials and Devices,Huizhou University,Huizhou,516007,China
2.Department of Materials Science and Engineering,Southern University of Science and Technology,Shenzhen,518000,China
3.School of Mechanical Engineering,Guilin University of Aerospace Technology,Guilin,541004,China
4.School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou,China
Corresponding Author AffilicationDepartment of Materials Science and Engineering
Recommended Citation
GB/T 7714
Mei,Haijuan,Yan,Kai,Wang,Rui,et al. Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS[J]. CERAMICS INTERNATIONAL,2022,49(1).
APA
Mei,Haijuan.,Yan,Kai.,Wang,Rui.,Peng,Weichao.,Huang,Kaijian.,...&Wang,Qimin.(2022).Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS.CERAMICS INTERNATIONAL,49(1).
MLA
Mei,Haijuan,et al."Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS".CERAMICS INTERNATIONAL 49.1(2022).
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