Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS
|Corresponding Author||Mei，Haijuan; Gong，Weiping; Ren，Fuzeng|
Due to its excellent lubricity and immiscibility with nitride phase, Cu has been added to nitrides to form a typical nanomultilayer structure. In this work, a hybrid deposition of AIP and PDCMS was applied to synthesize the multilayered AlTiN/Cu coatings, and the relationship between microstructure and mechanical properties was explored. The Cu-free AlTiN coating exhibited a c-TiAlN phase with a strong (200) preferred orientation. After adding Cu layer, the microstructure changed from a dense columnar structure into a featureless structure and then a fine-grained structure. As the Cu layer thickness reached 5.1 nm, the AlTiN/Cu(18.4 at.%) coating showed a double-phase of c-TiAlN and c-Cu. The thickness modulation period of Cu/AlTiN sublayer exhibited an excellent linear relationship with the content ratio of Cu/(Al + Ti). After adding Cu, the ion bombardment effect was weakened, the AlTiN/Cu(2.9 at.%) coating exhibited the lowest surface roughness of 18.9 nm, and the hardness gradually decreased from 34.6 to 13.2 GPa, accompanied by a relaxation of residual stress. Due to a high H/E* ratio, a maximum adhesion strength of 83.0 N was obtained at 2.9 at.% Cu.
Basic and Applied Basic Research Foundation of Guangdong Province[2020A1515110016];Huizhou University[2020JB010];Department of Education of Guangdong Province[2021KQNCX091];National Natural Science Foundation of China;National Natural Science Foundation of China;Huizhou University[HZU202005];Huizhou University[IRTHZU];
|WOS Research Area|
Materials Science, Ceramics
|WOS Accession No|
|EI Accession Number|
Aluminum compounds ; Coatings ; Copper compounds ; Hybrid systems ; Ion bombardment ; Silicon compounds ; Surface roughness ; Titanium nitride
|ESI Classification Code|
Inorganic Compounds:804.2 ; Coating Materials:813.2 ; Mathematics:921 ; Physical Properties of Gases, Liquids and Solids:931.2 ; High Energy Physics:932.1 ; Materials Science:951
|ESI Research Field|
Cited Times [WOS]:0
|Document Type||Journal Article|
|Department||Department of Materials Science and Engineering|
1.Guangdong Provincial Key Laboratory of Electronic Functional Materials and Devices,Huizhou University,Huizhou,516007,China
2.Department of Materials Science and Engineering,Southern University of Science and Technology,Shenzhen,518000,China
3.School of Mechanical Engineering,Guilin University of Aerospace Technology,Guilin,541004,China
4.School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou,China
|Corresponding Author Affilication||Department of Materials Science and Engineering|
Mei，Haijuan,Yan，Kai,Wang，Rui,et al. Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS[J]. CERAMICS INTERNATIONAL,2022,49(1).
Mei，Haijuan.,Yan，Kai.,Wang，Rui.,Peng，Weichao.,Huang，Kaijian.,...&Wang，Qimin.(2022).Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS.CERAMICS INTERNATIONAL,49(1).
Mei，Haijuan,et al."Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS".CERAMICS INTERNATIONAL 49.1(2022).
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