Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS

Mei，Haijuan1; Yan，Kai2; Wang，Rui3; Peng，Weichao1; Huang，Kaijian1; Shi，Jijuan1; Zhang，Duoduo1; Gong，Weiping1; Ren，Fuzeng2; Wang，Qimin4

2022

10.1016/j.ceramint.2022.08.332

CERAMICS INTERNATIONAL   Impact Factor & Quartile

0272-8842

1873-3956

Due to its excellent lubricity and immiscibility with nitride phase, Cu has been added to nitrides to form a typical nanomultilayer structure. In this work, a hybrid deposition of AIP and PDCMS was applied to synthesize the multilayered AlTiN/Cu coatings, and the relationship between microstructure and mechanical properties was explored. The Cu-free AlTiN coating exhibited a c-TiAlN phase with a strong (200) preferred orientation. After adding Cu layer, the microstructure changed from a dense columnar structure into a featureless structure and then a fine-grained structure. As the Cu layer thickness reached 5.1 nm, the AlTiN/Cu(18.4 at.%) coating showed a double-phase of c-TiAlN and c-Cu. The thickness modulation period of Cu/AlTiN sublayer exhibited an excellent linear relationship with the content ratio of Cu/(Al + Ti). After adding Cu, the ion bombardment effect was weakened, the AlTiN/Cu(2.9 at.%) coating exhibited the lowest surface roughness of 18.9 nm, and the hardness gradually decreased from 34.6 to 13.2 GPa, accompanied by a relaxation of residual stress. Due to a high H/E* ratio, a maximum adhesion strength of 83.0 N was obtained at 2.9 at.% Cu.

AIP/PDCMS AlTiN/Cu Mechanical properties Microstructure

EI ; SCI

English

Corresponding

Basic and Applied Basic Research Foundation of Guangdong Province[2020A1515110016];Huizhou University[2020JB010];Department of Education of Guangdong Province[2021KQNCX091];National Natural Science Foundation of China[51672100];National Natural Science Foundation of China[51875109];Huizhou University[HZU202005];Huizhou University[IRTHZU];

Materials Science

Materials Science, Ceramics

WOS:000931979300024

ELSEVIER SCI LTD

20223712734916

Aluminum compounds ; Coatings ; Copper compounds ; Hybrid systems ; Ion bombardment ; Silicon compounds ; Surface roughness ; Titanium nitride

Inorganic Compounds:804.2 ; Coating Materials:813.2 ; Mathematics:921 ; Physical Properties of Gases, Liquids and Solids:931.2 ; High Energy Physics:932.1 ; Materials Science:951

MATERIALS SCIENCE

2-s2.0-85137723319

Scopus

1.Guangdong Provincial Key Laboratory of Electronic Functional Materials and Devices,Huizhou University,Huizhou,516007,China
2.Department of Materials Science and Engineering,Southern University of Science and Technology,Shenzhen,518000,China
3.School of Mechanical Engineering,Guilin University of Aerospace Technology,Guilin,541004,China
4.School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou,China

Mei，Haijuan,Yan，Kai,Wang，Rui,et al. Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS[J]. CERAMICS INTERNATIONAL,2022,49(1).

Mei，Haijuan.,Yan，Kai.,Wang，Rui.,Peng，Weichao.,Huang，Kaijian.,...&Wang，Qimin.(2022).Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS.CERAMICS INTERNATIONAL,49(1).

Mei，Haijuan,et al."Microstructure and mechanical properties of nanomultilayered AlTiN/Cu coatings prepared by a hybrid system of AIP and PDCMS".CERAMICS INTERNATIONAL 49.1(2022).