Title | Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces |
Author | |
Corresponding Author | Xu,Shaolin |
Publication Years | 2022-12-01
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DOI | |
Source Title | |
EISSN | 2041-1723
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Volume | 13Issue:1 |
Abstract | Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. We develop a patterned pulse laser lithography (PPLL) approach to create structure arrays with sub-wavelength feature resolution and periods from less than 1 μm to over 15 μm on large-area thin films with substrates under ambient conditions. Separated ultrafast laser pulses with patterned wavefront by quasi-binary phase masks rapidly create periodic ablated/modified structures by high-speed scanning. The gradient intensity boundary and circular polarization of the wavefront weaken diffraction and polarization-dependent asymmetricity effects during light propagation for high uniformity. Structural units of metasurfaces are obtained on metal and inorganic photoresist films, such as antennas, catenaries, and nanogratings. We demonstrate a large-area metasurface (10 × 10 mm) revealing excellent infrared absorption (3–7 μm), which comprises 250,000 concentric rings and takes only 5 minutes to produce. |
URL | [Source Record] |
Language | English
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Important Publications | NI Journal Papers
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SUSTech Authorship | First
; Corresponding
|
Scopus EID | 2-s2.0-85139153199
|
Data Source | Scopus
|
Citation statistics |
Cited Times [WOS]:4
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Document Type | Journal Article |
Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/406168 |
Department | Department of Mechanical and Energy Engineering |
Affiliation | 1.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,1088 Xueyuan Avenue,518055,China 2.Department of Mechanical Engineering,Iowa State University,Ames,50011,United States |
First Author Affilication | Department of Mechanical and Energy Engineering |
Corresponding Author Affilication | Department of Mechanical and Energy Engineering |
First Author's First Affilication | Department of Mechanical and Energy Engineering |
Recommended Citation GB/T 7714 |
Huang,Lingyu,Xu,Kang,Yuan,Dandan,et al. Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces[J]. Nature Communications,2022,13(1).
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APA |
Huang,Lingyu,Xu,Kang,Yuan,Dandan,Hu,Jin,Wang,Xinwei,&Xu,Shaolin.(2022).Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces.Nature Communications,13(1).
|
MLA |
Huang,Lingyu,et al."Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces".Nature Communications 13.1(2022).
|
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