Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces
Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. We develop a patterned pulse laser lithography (PPLL) approach to create structure arrays with sub-wavelength feature resolution and periods from less than 1 μm to over 15 μm on large-area thin films with substrates under ambient conditions. Separated ultrafast laser pulses with patterned wavefront by quasi-binary phase masks rapidly create periodic ablated/modified structures by high-speed scanning. The gradient intensity boundary and circular polarization of the wavefront weaken diffraction and polarization-dependent asymmetricity effects during light propagation for high uniformity. Structural units of metasurfaces are obtained on metal and inorganic photoresist films, such as antennas, catenaries, and nanogratings. We demonstrate a large-area metasurface (10 × 10 mm) revealing excellent infrared absorption (3–7 μm), which comprises 250,000 concentric rings and takes only 5 minutes to produce.
NI Journal Papers
First ; Corresponding
Cited Times [WOS]:1
|Document Type||Journal Article|
|Department||Department of Mechanical and Energy Engineering|
1.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,1088 Xueyuan Avenue,518055,China
2.Department of Mechanical Engineering,Iowa State University,Ames,50011,United States
|First Author Affilication||Department of Mechanical and Energy Engineering|
|Corresponding Author Affilication||Department of Mechanical and Energy Engineering|
|First Author's First Affilication||Department of Mechanical and Energy Engineering|
Huang，Lingyu,Xu，Kang,Yuan，Dandan,et al. Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces[J]. Nature Communications,2022,13(1).
Huang，Lingyu,Xu，Kang,Yuan，Dandan,Hu，Jin,Wang，Xinwei,&Xu，Shaolin.(2022).Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces.Nature Communications,13(1).
Huang，Lingyu,et al."Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces".Nature Communications 13.1(2022).
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