中文版 | English
Title

Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

Author
Corresponding AuthorXu,Shaolin
Publication Years
2022-12-01
DOI
Source Title
EISSN
2041-1723
Volume13Issue:1
Abstract
Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. We develop a patterned pulse laser lithography (PPLL) approach to create structure arrays with sub-wavelength feature resolution and periods from less than 1 μm to over 15 μm on large-area thin films with substrates under ambient conditions. Separated ultrafast laser pulses with patterned wavefront by quasi-binary phase masks rapidly create periodic ablated/modified structures by high-speed scanning. The gradient intensity boundary and circular polarization of the wavefront weaken diffraction and polarization-dependent asymmetricity effects during light propagation for high uniformity. Structural units of metasurfaces are obtained on metal and inorganic photoresist films, such as antennas, catenaries, and nanogratings. We demonstrate a large-area metasurface (10 × 10 mm) revealing excellent infrared absorption (3–7 μm), which comprises 250,000 concentric rings and takes only 5 minutes to produce.
URL[Source Record]
Language
English
Important Publications
NI Journal Papers
SUSTech Authorship
First ; Corresponding
Scopus EID
2-s2.0-85139153199
Data Source
Scopus
Citation statistics
Cited Times [WOS]:4
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/406168
DepartmentDepartment of Mechanical and Energy Engineering
Affiliation
1.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,1088 Xueyuan Avenue,518055,China
2.Department of Mechanical Engineering,Iowa State University,Ames,50011,United States
First Author AffilicationDepartment of Mechanical and Energy Engineering
Corresponding Author AffilicationDepartment of Mechanical and Energy Engineering
First Author's First AffilicationDepartment of Mechanical and Energy Engineering
Recommended Citation
GB/T 7714
Huang,Lingyu,Xu,Kang,Yuan,Dandan,et al. Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces[J]. Nature Communications,2022,13(1).
APA
Huang,Lingyu,Xu,Kang,Yuan,Dandan,Hu,Jin,Wang,Xinwei,&Xu,Shaolin.(2022).Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces.Nature Communications,13(1).
MLA
Huang,Lingyu,et al."Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces".Nature Communications 13.1(2022).
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