中文版 | English
Title

A rolled-up-based fabrication method of 3D helical microrobots

Author
Corresponding AuthorU. Kei,Cheang
Joint first authorXueliang,Mu; Liyuan,Tan
Publication Years
2022-11-29
DOI
Source Title
ISSN
2296-9144
Volume9
Abstract

While the potential of using helical microrobots for biomedical applications, such as cargo transport, drug delivery, and micromanipulation, had been demonstrated, the viability to use them for practical applications is hindered by the cost, speed, and repeatability of current fabrication techniques. Hence, this paper introduces a simple, low-cost, high-throughput manufacturing process for single nickel layer helical microrobots with consistent dimensions. Photolithography and electron-beam (e-beam) evaporation were used to fabricate 2D parallelogram patterns that were sequentially rolled up into helical microstructures through the swelling effect of a photoresist sacrificial layer. Helical parameters were controlled by adjusting the geometric parameters of parallelogram patterns. To validate the fabrication process and characterize the microrobots' mobility, we characterized the structures and surface morphology of the microrobots using a scanning electron microscope and tested their steerability using feedback control, respectively. Finally, we conducted a benchmark comparison to demonstrate that the fabrication method can produce helical microrobots with swimming properties comparable to previously reported microrobots.

Keywords
URL[Source Record]
Indexed By
Language
English
SUSTech Authorship
First ; 共同第一 ; Corresponding
Funding Project
Science and Technology Innovation Committee Foundation of Shenzhen[2021ZDZX2037] ; Shenzhen municipal government (Peacock Plan)[
WOS Research Area
Robotics
WOS Subject
Robotics
WOS Accession No
WOS:000898256300001
Publisher
Data Source
人工提交
Citation statistics
Cited Times [WOS]:0
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/416082
DepartmentDepartment of Mechanical and Energy Engineering
工学院
Affiliation
1.Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen, China
2.Department of Biomedical Engineering, University of Groningen and University Medical Center Groningen, Groningen, Netherlands
3.Department of Mechanical and Manufacturing Engineering, University of Calgary, Calgary, AB, Canada
4.Shenzhen Key Laboratory of Biomimetic Robotics and Intelligent Systems, Southern University of Science and Technology, Shenzhen, China
5.Guangdong Provincial Key Laboratory of Human-Augmentation and Rehabilitation Robotics in Universities, Southern University of Science and Technology, Shenzhen, China
First Author AffilicationDepartment of Mechanical and Energy Engineering
Corresponding Author AffilicationDepartment of Mechanical and Energy Engineering;  Southern University of Science and Technology
First Author's First AffilicationDepartment of Mechanical and Energy Engineering
Recommended Citation
GB/T 7714
Zihan,Wang,Xueliang,Mu,Liyuan,Tan,et al. A rolled-up-based fabrication method of 3D helical microrobots[J]. Frontiers in Robotics and AI,2022,9.
APA
Zihan,Wang,Xueliang,Mu,Liyuan,Tan,Yukun,Zhong,&U. Kei,Cheang.(2022).A rolled-up-based fabrication method of 3D helical microrobots.Frontiers in Robotics and AI,9.
MLA
Zihan,Wang,et al."A rolled-up-based fabrication method of 3D helical microrobots".Frontiers in Robotics and AI 9(2022).
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frobt-09-1063987.pdf(1654KB) Restricted Access--
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