On the deformation mechanism of 6H-SiC under the nanogrinding of multiple abrasive grains

Wu，Zhonghuai1; Zhang，Liangchi2,3,4; Yang，Shengyao5

2023

10.1016/j.triboint.2022.108119

TRIBOLOGY INTERNATIONAL   Impact Factor & Quartile

0301-679X

1879-2464

This paper investigates effects of nanogrinding-induced defect on deformation of 6H-SiC with the aid of molecular dynamic analyses. It was found that nanogrinding perfect 6H-SiC will unavoidably bring about a damage layer containing amorphous phase transformation and discrete dislocations. The damage will significantly affect the subsequent deformation, surface morphology, grinding force and coefficient of friction. Under the interactions with the consecutive abrasives, the deformation mechanism of 6H-SiC transits from plastic flow within the amorphous layer to the propagation of existing dislocations and finally to the nucleation of new dislocations. The remnant amorphous layer on the ground surface can be minimized when the grinding depth of the subsequent grains is to be less than the thickness of the first amorphous layer.

Damage minimization Material removal Molecular dynamics Nanogrinding Silicon carbide

SCI

English

Corresponding

Chinese Guangdong Specific Discipline Project[2020ZDZX2006] ; Shenzhen Key Laboratory Project of Cross-scale Manufacturing Mechanics[ZDSYS20200810171201007]

Engineering

Engineering, Mechanical

WOS:000928186800003

ELSEVIER SCI LTD

ENGINEERING

2-s2.0-85143339474

Scopus

1.Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing,100081,China
2.Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics,Southern University of Science and Technology,Shenzhen,Guangdong,518055,China
3.SUSTech Institute for Manufacturing Innovation,Southern University of Science and Technology,Shenzhen,Guangdong,518055,China
4.Department of Mechanics and Aerospace Engineering,Southern University of Science and Technology,Shenzhen,Guangdong,518055,China
5.School of Mechanical and Mining Engineering,The University of Queensland,Brisbane,4072,Australia

Wu，Zhonghuai,Zhang，Liangchi,Yang，Shengyao. On the deformation mechanism of 6H-SiC under the nanogrinding of multiple abrasive grains[J]. TRIBOLOGY INTERNATIONAL,2023,179.

Wu，Zhonghuai,Zhang，Liangchi,&Yang，Shengyao.(2023).On the deformation mechanism of 6H-SiC under the nanogrinding of multiple abrasive grains.TRIBOLOGY INTERNATIONAL,179.

Wu，Zhonghuai,et al."On the deformation mechanism of 6H-SiC under the nanogrinding of multiple abrasive grains".TRIBOLOGY INTERNATIONAL 179(2023).