| Title | Fast response PDMS/GaN Optical Vacuum Microsensors |
| Author | |
| Corresponding Author | Kwai Hei Li |
| Publication Years | 2022
|
| DOI | |
| Source Title | |
| ISSN | 1558-0563
|
| Volume | PPIssue:99Pages:1-1 |
| Keywords | |
| URL | [Source Record] |
| Indexed By | |
| Language | English
|
| SUSTech Authorship | First
; Corresponding
|
| ESI Research Field | ENGINEERING
|
| Data Source | IEEE
|
| PDF url | https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9978916 |
| Citation statistics |
Cited Times [WOS]:0
|
| Document Type | Journal Article |
| Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/419324 |
| Department | SUSTech Institute of Microelectronics |
| Affiliation | 1.School of Microelectronics, Southern University of Science and Technology, Shenzhen, China 2.Guangdong Provincial Engineering Research Center of 3-D Integration, Southern University of Science and Technology, Shenzhen, China |
| First Author Affilication | SUSTech Institute of Microelectronics |
| Corresponding Author Affilication | Southern University of Science and Technology |
| First Author's First Affilication | SUSTech Institute of Microelectronics; Southern University of Science and Technology |
| Recommended Citation GB/T 7714 |
Fan Geng,Binlu Yu,Kwai Hei Li. Fast response PDMS/GaN Optical Vacuum Microsensors[J]. IEEE Electron Device Letters,2022,PP(99):1-1.
|
| APA |
Fan Geng,Binlu Yu,&Kwai Hei Li.(2022).Fast response PDMS/GaN Optical Vacuum Microsensors.IEEE Electron Device Letters,PP(99),1-1.
|
| MLA |
Fan Geng,et al."Fast response PDMS/GaN Optical Vacuum Microsensors".IEEE Electron Device Letters PP.99(2022):1-1.
|
| Files in This Item: | There are no files associated with this item. | |||||
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