Primary irradiation damages and tribological property evolutions of heavy-ion radiated microcrystalline diamond films grown by MPCVD

Xu，Jiao1,2,3; Liu，Yuhang1; Guo，Zhenbin1; Liang，Wenjun4; Wu，Sudong5; Lin，Jianjun1; Nian，Jingyan6; Guo，Dengji1,2,3; Wang，Xujin1,2,3

2023-03-01

10.1016/j.diamond.2023.109718

DIAMOND AND RELATED MATERIALS   Impact Factor & Quartile

0925-9635

This study elucidates the structure and property evolution of microcrystalline diamond (MCD) films radiated by 3.25-MeV Xe ions with an ion fluence of 4.24 × 10 to 4.24 × 10 ions/cm. The results reveal that, compared with nanocrystalline diamond (NCD) films with remarkable irradiation-enhanced lubrication properties, it is difficult to obtain a synergy of the mechanical strength, radiation resistance, and self-lubrication properties of MCD films under irradiation conditions. Various characterizations, including AFM, SEM, visible Raman, XPS, and HRTEM, suggest that radiated MCD films first underwent disintegration of MCD grains into ultra-nanocrystalline diamond (UNCD) grains in the range of 0–1.0 dpa, and then the UNCD grains were transformed into a sp-riched amorphous structure in the range of 1.0–2.0 dpa. 2.0 dpa is a threshold damage, from which the film structures, as well as the film mechanical and tribological properties, stepped into a quasi-saturation state. This tendency was identical to that of the NCD films; however, it resulted in poor lubrication properties compared to the radiated NCD films. The radiation-induced sp-to-sp transformation resulted in significant degradation of the film mechanical strength, and the well-faceted morphology made it difficult to form lubricious transfer films on the sliding interfaces.

Heavy-ion irradiation Microcrystalline diamond film Property evolution Structural transformation

English

Others

MATERIALS SCIENCE

2-s2.0-85146905830

Scopus

1.Institute of Semiconductor Manufacturing Research,Shenzhen University,Shenzhen,Guangdong,518060,China
2.College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen,Guangdong,518060,China
3.Institute of Microelectronics,Shenzhen University,Shenzhen,Guangdong,518060,China
4.Department of Materials Science and Engineering,Southern University of Science and Technology,Shenzhen,Guangdong,518055,China
5.Academy for Advanced Interdisciplinary Studies,Southern University of Science and Technology,Shenzhen,518055,China
6.State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou,730000,China

Xu，Jiao,Liu，Yuhang,Guo，Zhenbin,et al. Primary irradiation damages and tribological property evolutions of heavy-ion radiated microcrystalline diamond films grown by MPCVD[J]. DIAMOND AND RELATED MATERIALS,2023,133.

Xu，Jiao.,Liu，Yuhang.,Guo，Zhenbin.,Liang，Wenjun.,Wu，Sudong.,...&Wang，Xujin.(2023).Primary irradiation damages and tribological property evolutions of heavy-ion radiated microcrystalline diamond films grown by MPCVD.DIAMOND AND RELATED MATERIALS,133.

Xu，Jiao,et al."Primary irradiation damages and tribological property evolutions of heavy-ion radiated microcrystalline diamond films grown by MPCVD".DIAMOND AND RELATED MATERIALS 133(2023).