Synthesis of functional nitride membranes using sacrificial water-soluble BaO layers

Chen, Shengru1,2; Jin, Qiao1; Lin, Shan1; Hong, Haitao1,2; Cui, Ting1,2; Rong, Dongke1; Song, Guozhu3; Wang, Shanmin3; Jin, Kuijuan1,2,4; Zheng, Qiang5; Guo, Er-Jia1,2,4; Guo, Er-Jia

2023-01-28

10.1063/5.0138633

JOURNAL OF APPLIED PHYSICS   Impact Factor & Quartile

0021-8979

1089-7550

Transition metal nitrides (TMNs) exhibit fascinating physical properties that hold great potential in future device applications. To stack two-dimensional TMNs with other functional materials that have dissimilar orientations and symmetries requires to separate epitaxial TMNs from the growth substrates. However, the lattice constants of TMNs are not compatible with those of most sacrificial layers, leading to a great challenge to fabricate high-quality single crystalline TMN membranes. In this letter, we report the application of a water-soluble BaO sacrificial layer as a general approach to create freestanding TMN membranes. Taken CrN as an example, the relatively small lattice mismatch and identical cubic structure between BaO and CrN ensure the growth of heterostructures. Millimeter-size CrN membrane allows us to directly observe the planar-view of atomic structure and to correlate its electronic state with intrinsic transport properties. Our work provides the opportunity to fabricate freestanding TMN membranes and the ability to transfer them to arbitrary substrates. The integration of TMN membranes with other materials will stimulate further studies in the emergent phenomena at heterointerfaces.

SCI

English

Others

National Key Basic Research Program of China["2020YFA0309100","2021YFA1202801"] ; Beijing Municipal Natural Science Foundation[1212016] ; National Natural Science Foundation of China["11974390","11721404"] ; Beijing Nova Program of Science and Technology[Z191100001119112] ; Strategic Priority Research Program (B) of the Chinese Academy of Sciences["XDB33030200","XDB36000000"]

Physics

Physics, Applied

WOS:000926497500002

AIP Publishing

PHYSICS

Web of Science

1.Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing, Peoples R China
2.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Sch Phys Sci, Beijing, Peoples R China
3.Southern Univ Sci & Technol, Dept Phys, Shenzhen 518055, Peoples R China
4.Songshan Lake Mat Lab, Dongguan, Peoples R China
5.Natl Ctr Nanosci & Technol, CAS Ctr Excellence Nanosci, CAS Key Lab Standardizat & Measurement Nanotechnol, Beijing, Peoples R China

Chen, Shengru,Jin, Qiao,Lin, Shan,et al. Synthesis of functional nitride membranes using sacrificial water-soluble BaO layers[J]. JOURNAL OF APPLIED PHYSICS,2023,133(4).

Chen, Shengru.,Jin, Qiao.,Lin, Shan.,Hong, Haitao.,Cui, Ting.,...&Guo, Er-Jia.(2023).Synthesis of functional nitride membranes using sacrificial water-soluble BaO layers.JOURNAL OF APPLIED PHYSICS,133(4).

Chen, Shengru,et al."Synthesis of functional nitride membranes using sacrificial water-soluble BaO layers".JOURNAL OF APPLIED PHYSICS 133.4(2023).