Line-shaped laser lithography for efficient fabrication of large-area subwavelength nanogratings

Xu, Kang; Huang, Lingyu; Xu, Shaolin

2023-01-20

10.1364/OPTICA.472730

Optica   Impact Factor & Quartile

2334-2536

Subwavelength nanogratings for optical modulation have attracted significant attention for efficient large-area fabrication. We developed a far-field laser nanofabrication method, called line-shaped laser lithography, to ablate thin films with separated line-shaped ultrafast laser pulses on substrates into multiple nanogratings. The millimeter pulse length and high-speed scanning for a single-pulse ablation ensure exceptionally high large-area fabrication efficiency. Moreover, nanogratings with a sub-100 nm line width (e.g., a 57 nm linewidth (similar to lambda=9) nanograting on 10 nm Au film) were generated based on the Marangoni effect. An ultra-uniform large-area (6 x 15 mm(2)) nanograting with a width of 132 nm and a length-to-width ratio of similar to 45,500 was achieved in only 1.5 s. In particular, diversified nanogratings can be obtained by designing scanning strategies, including moire, blaze-like, Dammann, and 2D nanogratings, revealing light modulations in diffraction and beam splitting. (c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

SCI

English

First ; Corresponding

Guangdong Provincial University Science and Technology Program[2020KTSCX119] ; Shenzhen Science and Technology Program["20200925155508001","GJHZ20190820151801786","JCYJ20210324115608024","KQTD20170810110250357"]

Optics

Optics

WOS:000925705900001

Optica Publishing Group

Web of Science

Southern Univ Sci & Technol, Dept Mech & Energy Engn, 1088 Xueyuan Ave, Shenzhen 518055, Peoples R China

Xu, Kang,Huang, Lingyu,Xu, Shaolin. Line-shaped laser lithography for efficient fabrication of large-area subwavelength nanogratings[J]. Optica,2023,10(1).

Xu, Kang,Huang, Lingyu,&Xu, Shaolin.(2023).Line-shaped laser lithography for efficient fabrication of large-area subwavelength nanogratings.Optica,10(1).

Xu, Kang,et al."Line-shaped laser lithography for efficient fabrication of large-area subwavelength nanogratings".Optica 10.1(2023).