Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas Sensors

Yi Zhuang; Gaoqiang Niu; Lang Wu; Fei Wang

10.1109/MEMS49605.2023.10052316

2023

36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999

978-1-6654-9309-3

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

913-916

15-19 Jan. 2023

Munich, Germany

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

We have proposed a millisecond-level sensing system for MEMS-based SnO2 gas sensors. Metal oxide semiconductors (MOSs) gas sensor normally works at high temperature, which is heated by a pair of electrodes on the micro-hotplate. In the conventional method, a constant/DC heating voltage is applied to establish a steady temperature, which demands high power consumption and long gas sensing times. MEMS-based MOSs gas sensors, with low power consumption and low thermal inertia, provide the possibility to employ a millisecond pulsed heating voltage. Herein, a 4x4 sensor array testing system has been prepared based on the pulse-heating strategy. By utilizing line scanning and parallel reading, the system realized the quality discrimination of the sensors with a home-made hardware. To address the instability of the sensing system in pulse-heating mode, Rg-50 ppm/Rg was used to describe the performance of the sensors and the reliability of the system was obviously improved.

Gas Sensor Pulse-heating Fast Detection Sensing System

First

English

CPCI-S

Shenzhen Science and Technology Innovation Committee[JCYJ20170412154426330] ; Foundation for Distinguished Young Talents in Higher Education of Guangdong, China[2018KQNX226] ; Guangdong Natural Science Funds["2016A030306042","2018A050506001"]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000975359200238

IEEE

School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

Yi Zhuang,Gaoqiang Niu,Lang Wu,et al. Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas Sensors[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2023:913-916.