Title | Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas Sensors |
Author | |
DOI | |
Publication Years | 2023
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Conference Name | 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
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ISSN | 1084-6999
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ISBN | 978-1-6654-9309-3
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Source Title | |
Pages | 913-916
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Conference Date | 15-19 Jan. 2023
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Conference Place | Munich, Germany
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Publication Place | 345 E 47TH ST, NEW YORK, NY 10017 USA
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Publisher | |
Abstract | We have proposed a millisecond-level sensing system for MEMS-based SnO2 gas sensors. Metal oxide semiconductors (MOSs) gas sensor normally works at high temperature, which is heated by a pair of electrodes on the micro-hotplate. In the conventional method, a constant/DC heating voltage is applied to establish a steady temperature, which demands high power consumption and long gas sensing times. MEMS-based MOSs gas sensors, with low power consumption and low thermal inertia, provide the possibility to employ a millisecond pulsed heating voltage. Herein, a 4x4 sensor array testing system has been prepared based on the pulse-heating strategy. By utilizing line scanning and parallel reading, the system realized the quality discrimination of the sensors with a home-made hardware. To address the instability of the sensing system in pulse-heating mode, Rg-50 ppm/Rg was used to describe the performance of the sensors and the reliability of the system was obviously improved. |
Keywords | |
SUSTech Authorship | First
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Language | English
|
URL | [Source Record] |
Indexed By | |
Funding Project | Shenzhen Science and Technology Innovation Committee[JCYJ20170412154426330]
; Foundation for Distinguished Young Talents in Higher Education of Guangdong, China[2018KQNX226]
; Guangdong Natural Science Funds["2016A030306042","2018A050506001"]
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WOS Research Area | Engineering
; Science & Technology - Other Topics
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WOS Subject | Engineering, Electrical & Electronic
; Engineering, Mechanical
; Nanoscience & Nanotechnology
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WOS Accession No | WOS:000975359200238
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Data Source | IEEE
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PDF url | https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10052316 |
Citation statistics |
Cited Times [WOS]:0
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Document Type | Conference paper |
Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/502087 |
Department | SUSTech Institute of Microelectronics |
Affiliation | School of Microelectronics, Southern University of Science and Technology, Shenzhen, China |
First Author Affilication | SUSTech Institute of Microelectronics |
First Author's First Affilication | SUSTech Institute of Microelectronics |
Recommended Citation GB/T 7714 |
Yi Zhuang,Gaoqiang Niu,Lang Wu,et al. Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas Sensors[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2023:913-916.
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