中文版 | English
Title

Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas Sensors

Author
DOI
Publication Years
2023
Conference Name
36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN
1084-6999
ISBN
978-1-6654-9309-3
Source Title
Pages
913-916
Conference Date
15-19 Jan. 2023
Conference Place
Munich, Germany
Publication Place
345 E 47TH ST, NEW YORK, NY 10017 USA
Publisher
Abstract
We have proposed a millisecond-level sensing system for MEMS-based SnO2 gas sensors. Metal oxide semiconductors (MOSs) gas sensor normally works at high temperature, which is heated by a pair of electrodes on the micro-hotplate. In the conventional method, a constant/DC heating voltage is applied to establish a steady temperature, which demands high power consumption and long gas sensing times. MEMS-based MOSs gas sensors, with low power consumption and low thermal inertia, provide the possibility to employ a millisecond pulsed heating voltage. Herein, a 4x4 sensor array testing system has been prepared based on the pulse-heating strategy. By utilizing line scanning and parallel reading, the system realized the quality discrimination of the sensors with a home-made hardware. To address the instability of the sensing system in pulse-heating mode, Rg-50 ppm/Rg was used to describe the performance of the sensors and the reliability of the system was obviously improved.
Keywords
SUSTech Authorship
First
Language
English
URL[Source Record]
Indexed By
Funding Project
Shenzhen Science and Technology Innovation Committee[JCYJ20170412154426330] ; Foundation for Distinguished Young Talents in Higher Education of Guangdong, China[2018KQNX226] ; Guangdong Natural Science Funds["2016A030306042","2018A050506001"]
WOS Research Area
Engineering ; Science & Technology - Other Topics
WOS Subject
Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology
WOS Accession No
WOS:000975359200238
Data Source
IEEE
PDF urlhttps://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10052316
Citation statistics
Cited Times [WOS]:0
Document TypeConference paper
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/502087
DepartmentSUSTech Institute of Microelectronics
Affiliation
School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
First Author AffilicationSUSTech Institute of Microelectronics
First Author's First AffilicationSUSTech Institute of Microelectronics
Recommended Citation
GB/T 7714
Yi Zhuang,Gaoqiang Niu,Lang Wu,et al. Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas Sensors[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2023:913-916.
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