The effects of feedback control parameters on the formation of protuberances in poly(methyl methacrylate) by dynamic plowing lithography

He，Yang1,2,3,4; Yan，Yongda1,5; Geng，Yanquan1,5

2023-05-01

10.1016/j.precisioneng.2023.02.012

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY   Impact Factor & Quartile

0141-6359

1873-2372

In this study, nanoscale protuberances were fabricated on poly(methyl methacrylate) (PMMA) thin-film surface by mechanical scanning probe lithography, namely dynamic plowing lithography (DPL). However, the formation mechanism of protuberances by DPL remains unclear. Therefore, this paper investigated the formation mechanism and fine control of the protuberances. Considering the influence of the dynamic response of the probe cantilever, proportional gain and integral gain were investigated when the tip scratched PMMA film in scan mode. Using feedback loop control, the increased depth of the groove at the beginning was attributed to the peak of the oscillation amplitude caused by the interplay between lithography and feedback. The cantilever vibrated dramatically when integral gain was increased. When the integral gain was increased to 5, the machined depth was approximately 82 nm, which exposed the substrate. Furthermore, the machined depth depended on the proportional gain when the integral gain was 0. The increased steady-state error that occurred at decreased proportional gain caused the tip to penetrate the sample deeper. In addition, the volume of the pile-up was larger than the removed material. And the material pile-up contributed to the fabrication of the protuberance. Finally, uniform and reliable protuberances were fabricated without proportional gain and integral gain.

Atomic force microscopy Dynamic plowing lithography Feedback loop Protuberance

SCI

English

Others

National Natural Science Foundation of China["52222512","52035004","52293401"] ; Natural Science Foundation of Heilongjiang Province of China[YQ2020E015] ; Young Elite Scientist Sponsorship Program by CAST[YESS20200155] ; Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics Project[ZDSYS20200810171201007] ; Shenzhen Science and Technology Program[RCBS20210706092216025]

Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation

Engineering, Multidisciplinary ; Engineering, Manufacturing ; Nanoscience & Nanotechnology ; Instruments & Instrumentation

WOS:001029787000001

ELSEVIER SCIENCE INC

ENGINEERING

2-s2.0-85149799981

Scopus

1.Center for Precision Engineering,Harbin Institute of Technology,Harbin,150001,China
2.Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics,Southern University of Science and Technology,Shenzhen,518055,China
3.SUSTech Institute for Manufacturing Innovation,Southern University of Science and Technology,Shenzhen,518055,China
4.Department of Mechanics and Aerospace Engineering,Southern University of Science and Technology,Shenzhen,518055,China
5.The State Key Laboratory of Robotics and Systems,Robotics Institute,Harbin Institute of Technology,Harbin,150001,China

He，Yang,Yan，Yongda,Geng，Yanquan. The effects of feedback control parameters on the formation of protuberances in poly(methyl methacrylate) by dynamic plowing lithography[J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,2023,81:232-239.

He，Yang,Yan，Yongda,&Geng，Yanquan.(2023).The effects of feedback control parameters on the formation of protuberances in poly(methyl methacrylate) by dynamic plowing lithography.PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,81,232-239.

He，Yang,et al."The effects of feedback control parameters on the formation of protuberances in poly(methyl methacrylate) by dynamic plowing lithography".PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 81(2023):232-239.