Enhanced surface effects and optical property modulation of Ge2Sb2Te5 by pulsed laser irradiation

Liang, Jinxuan1,2; Chen, Guoqiang1,2; Niu, Xiaoke1,2; Zhu, Zhuoxuan1,2; Dong, Yida1,2; Wang, Yunzheng3; Wei, Qi-Huo1,2; Pan, Jieming4; LI, Yida1,2; Gu, Chuanchuan1,2; Shen, Mei1,2; Xiang, X. -D.1,2

2023-03-01

10.1364/OME.481640

Optical Materials Express   Impact Factor & Quartile

2159-3930

In this work, Ge2Sb2Te5 (GST) thin films are irradiated by a 1064 nm pulsed laser heat treatment system with different beam profiles. The surface effects induced by different laser conditions are studied systematically by atomic force microscope, spectroscopic ellipsometry, and Raman spectroscopy. It is found that a top-hat beam profile with uniform intensity distribution demonstrates the advantages of a non-destructive and homogeneous surface, which is critical for large-scale processing uniformity. The threshold laser fluence for the amorphization process is predicted by simulation and further proved by the laser irradiation experiment to be 27.9 mJ/cm2 at 1 ns pulse width. We further show that modulation of complex refractive indices of GST thin films can be achieved with different duty ratios (spatial ratio of amorphization part) from 0% to 100%. Our approach paves the way for the precise control of the optical properties of PCMs in emerging optical applications such as photonic switches, optical memories, and all-optical neural networks.(c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

SCI

English

First ; Corresponding

Shenzhen Fundamental Research Program[JCYJ20190809143419448] ; National Natural Science Founda-tion of China[62174074]

Materials Science ; Optics

Materials Science, Multidisciplinary ; Optics

WOS:000946870800001

Optica Publishing Group

Web of Science

1.Southern Univ Sci & Technol, Acad Adv Interdisciplinary Studies, Shenzhen 518000, Peoples R China
2.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen 518000, Peoples R China
3.Shandong Univ, Ctr Opt Res & Engn, Qingdao 266237, Peoples R China
4.Natl Univ Singapore, Dept Elect & Comp Engn, 4 Engn Dr 3, Singapore 117583, Singapore

Liang, Jinxuan,Chen, Guoqiang,Niu, Xiaoke,et al. Enhanced surface effects and optical property modulation of Ge2Sb2Te5 by pulsed laser irradiation[J]. Optical Materials Express,2023,13(3).

Liang, Jinxuan.,Chen, Guoqiang.,Niu, Xiaoke.,Zhu, Zhuoxuan.,Dong, Yida.,...&Xiang, X. -D..(2023).Enhanced surface effects and optical property modulation of Ge2Sb2Te5 by pulsed laser irradiation.Optical Materials Express,13(3).

Liang, Jinxuan,et al."Enhanced surface effects and optical property modulation of Ge2Sb2Te5 by pulsed laser irradiation".Optical Materials Express 13.3(2023).