中文版 | English
Title

Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC

Author
Corresponding AuthorZhao,Yonghua
Publication Years
2023-04-28
DOI
Source Title
ISSN
1526-6125
Volume92Pages:435-452
Abstract
Implementing anode discharge into electrochemical jet machining (EJM) makes it possible to process semiconductor material 4H-SiC. However, the characteristics and control principle of anodic discharge behavior in EJM remains unclear, while it significantly influences material removal and EJM precision. The present study reveals discharge behavior and its impact on material removal by controlling the imposed electrical and chemical conditions. The physicochemical properties and spatiotemporal distribution of discharges are discussed by analyzing the plasma region's temperature, luminescence, and material removal fashion. The findings reveal that discharges are preferentially ignited in certain areas where the current density is concentrated. The discharge intensity and location are controllable by the pulse cycle and electrical field distribution inside the jet (i.e., changing the jet angle). Reducing pulse duration leads to more localized and mild discharges, improving machining precision. A gas ionization-dominated anodic discharge model is proposed. Both discharge and electrolyte types exert significant influence on material removal. Using a DC supply provides a maximum machining rate of 1.44 mm/min. Meanwhile, an optimal surface finish Ra 170 nm and high shape precision with no overcut is achievable by applying high-frequency AC of 1000 Hz.
Keywords
URL[Source Record]
Language
English
SUSTech Authorship
First ; Corresponding
Scopus EID
2-s2.0-85150022721
Data Source
Scopus
Citation statistics
Cited Times [WOS]:0
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/515733
DepartmentDepartment of Mechanical and Energy Engineering
Affiliation
Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,518055,China
First Author AffilicationDepartment of Mechanical and Energy Engineering
Corresponding Author AffilicationDepartment of Mechanical and Energy Engineering
First Author's First AffilicationDepartment of Mechanical and Energy Engineering
Recommended Citation
GB/T 7714
Lu,Jiajun,Guan,Junming,Dong,Bangyan,et al. Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC[J]. Journal of Manufacturing Processes,2023,92:435-452.
APA
Lu,Jiajun,Guan,Junming,Dong,Bangyan,&Zhao,Yonghua.(2023).Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC.Journal of Manufacturing Processes,92,435-452.
MLA
Lu,Jiajun,et al."Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC".Journal of Manufacturing Processes 92(2023):435-452.
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