Investigations of Sidewall Passivation Using the Sol-Gel Method on the Optoelectronic Performance for Blue InGaN Micro-LEDs

Huang, Wenjun; Miao, Xiangyu; Liu, Zhaojun

2023-03-01

10.3390/mi14030566

MICROMACHINES   Impact Factor & Quartile

2072-666X

The optoelectronic effects of sidewall passivation on micro-light-emitting diodes (Micro-LEDs) were investigated using sol-gel chemical synthesis. Blue InGaN/GaN multi-quantum well (MQW) Micro-LEDs, ranging in size from 20 x 20 mu m to 100 x 100 mu m and with high EQE, were fabricated and distinguished by the passivation method used, including no passivation, sol-gel SiO2, and plasma-enhanced chemical vapor deposition (PECVD) SiO2. Impressively, the sol-gel method is advantageous in improving the optoelectronic performance of Micro-LEDs. The fabricated 20 x 20 mu m Micro-LEDs showed an EQE of 27.7% with sol-gel passivation, which was a 14% improvement compared to devices without sidewall passivation. Sol-gel sidewall passivation allows Micro-LEDs to effectively achieve sharper edge emission, superior surface luminous uniformity, and intensity, providing the possibility for the fabrication of low-cost and high-efficiency Micro-LEDs.

sidewall passivation sol-gel SiO2 GaN-based micro-light-emitting diodes (Micro-LEDs)

SCI

English

First ; Corresponding

Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics

Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied

WOS:000958110300001

MDPI

Web of Science

Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China

Huang, Wenjun,Miao, Xiangyu,Liu, Zhaojun. Investigations of Sidewall Passivation Using the Sol-Gel Method on the Optoelectronic Performance for Blue InGaN Micro-LEDs[J]. MICROMACHINES,2023,14(3).

Huang, Wenjun,Miao, Xiangyu,&Liu, Zhaojun.(2023).Investigations of Sidewall Passivation Using the Sol-Gel Method on the Optoelectronic Performance for Blue InGaN Micro-LEDs.MICROMACHINES,14(3).

Huang, Wenjun,et al."Investigations of Sidewall Passivation Using the Sol-Gel Method on the Optoelectronic Performance for Blue InGaN Micro-LEDs".MICROMACHINES 14.3(2023).