Title | 真空转移装置 |
Alternative Title | Vacuum transfer device
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Author | |
First Inventor | 张立源
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Original applicant | 南方科技大学
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First applicant | 南方科技大学
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Address of First applicant | 518055 广东省深圳市南山区西丽学苑大道1088号
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Current applicant | 南方科技大学
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Address of Current applicant | 518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
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First Current Applicant | 南方科技大学
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Address of First Current Applicant | 518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
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Application Number | CN202122225574.7
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Application Date | 2021-09-14
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Open (Notice) Number | CN216082449U
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Date Available | 2022-03-18
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Publication Years | 2022-03-18
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Status of Patent | 授权
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Legal Date | 2022-03-18
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Subtype | 实用新型
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SUSTech Authorship | First
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Abstract | 本实用新型公开了一种真空转移装置,应用于真空室中,包括:制冷装置,设于真空室内;放置台,设于真空室内,包括第一位移台和样品台,第一位移台与样品台连接,用于驱动样品台移动,样品台用于承载第一样品;转移台,设于真空室内,包括第二位移台和转移臂,第二位移台与转移臂连接,用于驱动转移臂移动,转移臂用于转移第二样品,并使第二样品与第一样品相贴合;显微镜,位于真空室外,并正对样品台。本实用新型的真空转移装置能够在低温环境下对第一样品进行转移。 |
Other Abstract | The utility model discloses a vacuum transfer device, which is applied to a vacuum chamber and comprises a refrigerating device, a vacuum pump and a vacuum pump, the placing table is arranged in the vacuum chamber and comprises a first displacement table and a sample table, the first displacement table is connected with the sample table and used for driving the sample table to move, and the sample table is used for bearing a first sample; the transfer table is arranged in the vacuum chamber and comprises a second displacement table and a transfer arm, the second displacement table is connected with the transfer arm and used for driving the transfer arm to move, and the transfer arm is used for transferring a second sample and enabling the second sample to be attached to the first sample; and the microscope is positioned outside the vacuum chamber and directly faces the sample table. The vacuum transfer device disclosed by the utility model can be used for transferring the first sample in a low-temperature environment. |
IPC Classification Number | G01N21/01
; G01N21/84
; G01N1/42
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INPADOC Legal Status | (+PATENT GRANT)[2022-03-18][CN]
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INPADOC Patent Family Count | 1
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Extended Patent Family Count | 1
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Priority date | 2021-09-14
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Patent Agent | 张英凤
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Agency | 广州嘉权专利商标事务所有限公司
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URL | [Source Record] |
Data Source | PatSnap
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Document Type | Patent |
Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/531484 |
Department | Department of Physics |
Recommended Citation GB/T 7714 |
张立源,史刚,吴超,等. 真空转移装置[P]. 2022-03-18.
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