南方科技大学知识苑(SUSTech KC): 自牺牲支撑层辅助的石墨烯转移方法及石墨烯

Title	自牺牲支撑层辅助的石墨烯转移方法及石墨烯
Alternative Title	Method for transferring graphene assisted by sacrificial support layer, and graphene
Author	程春; 钱德拉舍卡·巴拿拿克热·南杰果达; 蔡念铎; 李云龙; 安卡娜哈莉·珊卡热果达·斯弥萨; 王经纬; 王伟军 ; 胡曼曼
First Inventor	程春
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN201780080889.0
Application Date	2017-12-01
Open (Notice) Number	CN110234602A
Date Available	2019-09-13
Status of Patent	实质审查
Legal Date	2019-10-15
Subtype	发明申请
SUSTech Authorship	First
Abstract	一种自牺牲支撑层辅助的石墨烯转移方法，至少包括以下步骤：步骤S01.在化学气相沉积方法获得的包含金属基底的石墨烯表面进行樟脑溶液的多次涂覆处理，并对涂覆了所述樟脑溶液的石墨烯进行加热处理，获得层结构为樟脑‑石墨烯‑金属基底的叠层；步骤S02.对所述叠层进行刻蚀处理，去除所述金属基底，获得樟脑‑石墨烯薄膜；步骤S03.将所述樟脑‑石墨烯薄膜进行清洗处理，并将清洗处理后的所述樟脑‑石墨烯薄膜转移至基材表面；步骤S04.对步骤S03处理得到的所述基材连同所述樟脑‑石墨烯薄膜进行所述樟脑的去除处理。该方法不引入杂质，获得的石墨烯无支撑层残留、表面完整性良好，并且可以使石墨烯与目标基材紧密结合。
Other Abstract	A method for transferring graphene assisted by a sacrificial support layer, at least comprising the following steps: S01: performing multiple coating treatments of camphor solution on the surface of graphene containing a metal substrate acquired using a chemical vapour deposition, and performing heat treatment on the graphene coated with the camphor solution to acquire a stack having a camphor-graphene-metal substrate layered structure; S02: performing etching processing on the stack to remove the metal substrate and acquire a camphor-graphene thin film; S03: performing washing processing on the camphor-graphene thin film and transferring the washed camphor-graphene thin film to a substrate surface; and S04: performing camphor removal processing on the camphor-graphene thin film and the substrate obtained in step S03. The present method does not introduce impurities, the acquired graphene has no support layer residue and has good surface integrity, and the graphene can be tightly bonded to a target substrate.
CPC Classification Number	C01B32/194
IPC Classification Number	C01B32/194
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2019-10-15][CN]
INPADOC Patent Family Count	2
Extended Patent Family Count	2
Priority date	2017-12-01
Patent Agent	曹小翠
Agency	深圳中一专利商标事务所
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/532200
Department	Department of Materials Science and Engineering
Recommended Citation GB/T 7714	程春,钱德拉舍卡·巴拿拿克热·南杰果达,蔡念铎,等. 自牺牲支撑层辅助的石墨烯转移方法及石墨烯.

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