南方科技大学知识苑(SUSTech KC): 一种硅基材料的表面修整器及其在修型与抛光中的应用

Title	一种硅基材料的表面修整器及其在修型与抛光中的应用
Alternative Title	Surface finisher for silicon-based material and application of surface finisher in shaping and polishing
Author	邓辉
First Inventor	邓辉
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202211242803.9
Application Date	2022-10-11
Open (Notice) Number	CN115592555A
Date Available	2023-01-13
Status of Patent	实质审查
Legal Date	2023-02-07
Subtype	发明申请
SUSTech Authorship	First
Abstract	本发明公开了一种硅基材料的表面修整器及其在修型与抛光中的应用，所述修整器包括加工工件和加工液；所述加工工件的表面包覆有催化剂层；所述催化剂层包括铂、金、镍、铁和银中的至少一种；所述加工液包括水。本发明开发的硅基材料的表面修整器，能够实现在光学元件表面加工过程中保证高的面型精度和较低的表面粗糙度，同时避免加工过程中硅基材料表面产生的亚表面损伤。
Other Abstract	The invention discloses a surface finisher for a silicon-based material and application of the surface finisher in shaping and polishing. The finisher comprises a machining workpiece and machining liquid. The surface of the processing workpiece is coated with a catalyst layer; the catalyst layer comprises at least one of platinum, gold, nickel, iron and silver; the processing liquid comprises water. According to the developed silicon-based material surface trimmer, high surface precision and low surface roughness can be guaranteed in the optical element surface machining process, and meanwhile subsurface damage generated on the surface of the silicon-based material in the machining process is avoided.
IPC Classification Number	B24B37/00 ; B24B49/00 ; B24B37/005 ; B24B49/12
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2023-02-07][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2022-10-11
Patent Agent	黄广龙
Agency	广州嘉权专利商标事务所有限公司
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/532350
Department	Department of Mechanical and Energy Engineering
Recommended Citation GB/T 7714	邓辉. 一种硅基材料的表面修整器及其在修型与抛光中的应用.

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