南方科技大学知识苑(SUSTech KC): 一种纳米环的制备方法

Title	一种纳米环的制备方法
Alternative Title	Preparation method of nanoring
Author	刘召军; 蒋府龙; 李四龙
First Inventor	刘召军
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518000 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518000 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518000 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202010317602.5
Application Date	2020-04-21
Open (Notice) Number	CN111453693A
Date Available	2020-07-28
Status of Patent	实质审查
Legal Date	2020-08-21
Subtype	发明申请
SUSTech Authorship	First
Abstract	本发明实施例公开了一种纳米环的制备方法。该方法包括：在氮化镓基外延衬底上沉积出氧化膜；在所述氧化膜的表面旋涂光刻胶；基于具有预设图案的掩膜版对所述光刻胶进行曝光显影以将所述光刻胶图案化，所述图案化的光刻胶包括呈阵列排布在所述氧化膜上的多个纳米级环状凸起；基于所述图案化的光刻胶对所述氧化膜进行刻蚀以将所述氧化膜图案化，所述图案化的氧化膜包括呈阵列排布在所述氮化镓基外延衬底的多个纳米级环状凸起。本发明实施例实现了简单、低成本的制备氮化镓基纳米环。
Other Abstract	The embodiment of the invention discloses a preparation method of a nanoring. The method comprises the following steps: depositing an oxide film on a gallium nitride-based epitaxial substrate; spin-coating photoresist on the surface of the oxide film; carrying out exposure and development on the photoresist based on a mask plate with a preset pattern so as to pattern the photoresist, wherein the patterned photoresist comprises a plurality of nanoscale annular bulges arranged on the oxide film in an array manner; and etching the oxide film based on the patterned photoresist so as to pattern theoxide film, wherein the patterned oxide film comprises a plurality of nanoscale annular bulges which are arranged on the gallium nitride-based epitaxial substrate in an array manner. The embodiment of the invention realizes simple and low-cost preparation of the GaN-based nanoring.
CPC Classification Number	B81B7/04 ; B81C1/00031 ; B81C1/00103
IPC Classification Number	B81B7/04 ; B81C1/00
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2020-08-21][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2020-04-21
Patent Agent	孟金喆 ; 潘登
Agency	北京品源专利代理有限公司
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/532418
Department	Department of Electrical and Electronic Engineering
Recommended Citation GB/T 7714	刘召军,蒋府龙,李四龙. 一种纳米环的制备方法.

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