南方科技大学知识苑(SUSTech KC): 元件表面损伤修复装置及元件表面损伤修复方法

Title	元件表面损伤修复装置及元件表面损伤修复方法
Alternative Title	Element surface damage repairing device and element surface damage repairing method
Author	邓辉; 李如林
First Inventor	邓辉
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202210378002.9
Application Date	2022-04-12
Open (Notice) Number	CN114900942A
Date Available	2022-08-12
Status of Patent	实质审查
Legal Date	2022-08-30
Subtype	发明申请
SUSTech Authorship	First
Abstract	本申请公开了一种元件表面损伤修复装置及元件表面损伤修复方法，本申请的元件表面损伤修复装置包括石英炬管、气体管道、电火花发生器、电感线圈、电源模块和工作台。电火花发生器与石英炬管之间留有空隙；电感线圈缠绕设置在石英炬管外表面的下端；电源模块与电感线圈电连接；工作台位于石英炬管设置有电感线圈的一侧，并与石英炬管之间设置有空隙。本申请通过将电感耦合等离子体投射至待加工元件表面，在表面张力与等离子体气流的作用下原子团簇会发生迁移和重新排列，使得损伤区域的裂纹闭合，从而完成待加工元件的表面修复，并且不会引入新的损伤；此外，由于热源为电感耦合等离子体，因此修复完成后没有材料残留，提高了修复的质量。
Other Abstract	The invention discloses an element surface damage repairing device and an element surface damage repairing method. The element surface damage repairing device comprises a quartz torch tube, a gas pipeline, an electric spark generator, an inductance coil, a power module and a workbench. A gap is reserved between the electric spark generator and the quartz torch tube; the inductance coil is wound at the lower end of the outer surface of the quartz torch tube; the power supply module is electrically connected with the inductance coil; the workbench is located on the side, provided with the inductance coil, of the quartz torch tube, and a gap is formed between the workbench and the quartz torch tube. According to the method, the inductively coupled plasma is projected to the surface of the to-be-machined element, atomic clusters can migrate and rearrange under the action of surface tension and plasma airflow, cracks in a damaged area are closed, and therefore surface repairing of the to-be-machined element is completed, and no new damage is introduced; in addition, as the heat source is the inductively coupled plasma, no material is left after repairing is completed, and the repairing quality is improved.
CPC Classification Number	H05H1/34 ; H01F38/14 ; H01F5/00 ; Y02P70/50
IPC Classification Number	H05H1/34 ; H01F38/14 ; H01F5/00
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2022-08-30][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2022-04-12
Patent Agent	洪铭福
Agency	广州嘉权专利商标事务所有限公司
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/532455
Department	Department of Mechanical and Energy Engineering
Recommended Citation GB/T 7714	邓辉,李如林. 元件表面损伤修复装置及元件表面损伤修复方法.

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