南方科技大学知识苑(SUSTech KC): 超高真空电子束蒸发器、电子束镀膜装置

Title	超高真空电子束蒸发器、电子束镀膜装置
Alternative Title	Ultrahigh vacuum electron beam evaporator and electron beam coating device
Author	吴向方
First Inventor	吴向方
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区桃源街道学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区桃源街道学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区桃源街道学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202010458697.2
Application Date	2020-05-26
Open (Notice) Number	CN111663105A
Date Available	2020-09-15
Status of Patent	实质审查
Legal Date	2020-10-13
Subtype	发明申请
SUSTech Authorship	First
Abstract	本发明公开了一种超高真空电子束蒸发器、电子束镀膜装置，其中，包括：超高真空金属密封法兰、设置在所述超高真空金属密封法兰第一侧的升降机构、设置在所述超高真空金属密封法兰第二侧的水冷屏蔽桶、位于所述水冷屏蔽桶内并依次排列的材料承载坩埚、电子发射器以及蒸发离子流检测器；所述升降机构通过高压聚焦电极杆与所述材料承载坩埚连接，并用于调整所述材料承载坩埚与所述电子发射器之间的间距；所述电子发射器与所述超高真空金属密封法兰连接，所述蒸发离子流检测器与所述水冷屏蔽桶连接。本申请通过采用水冷屏蔽桶，避免蒸镀过程中对其他部件造成干扰或影响，有利于蒸镀中对蒸发速率的控制。
Other Abstract	The invention discloses an ultrahigh vacuum electron beam evaporator and an electron beam coating device. The ultrahigh vacuum electron beam evaporator comprises an ultrahigh vacuum metal sealing flange, a lifting mechanism arranged on the first side of the ultrahigh vacuum metal sealing flange, a water-cooling shielding barrel arranged on the second side of the ultrahigh vacuum metal sealing flange, a material bearing crucible, an electronic emitter and an evaporative ion flow detector, wherein the material bearing crucible, the electronic emitter and the evaporative ion flow detector are located in the water-cooling shielding barrel and arranged in sequence. The lifting mechanism is connected with the material bearing crucible through a high-voltage focusing electrode stem and used for adjusting the distance between the material bearing crucible and the electronic emitter. The electronic emitter is connected with the ultrahigh vacuum metal sealing flange. The evaporative ion flow detector is connected with the water-cooling shielding barrel. The ultrahigh vacuum electron beam evaporator prevents other components from being interfered or affected in the evaporation process and isbeneficial to controlling the evaporation rate in the evaporation process.
CPC Classification Number	C23C14/30 ; C23C14/543
IPC Classification Number	C23C14/30 ; C23C14/54
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2020-10-13][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2020-05-26
Patent Agent	徐凯凯 ; 谢松
Agency	深圳市君胜知识产权代理事务所(普通合伙)
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/532779
Department	School of Innovation and Entrepreneurship
Recommended Citation GB/T 7714	吴向方. 超高真空电子束蒸发器、电子束镀膜装置.

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