南方科技大学知识苑(SUSTech KC): 纳米阵列制备系统及纳米阵列制备方法

Title	纳米阵列制备系统及纳米阵列制备方法
Alternative Title	Nanometer array preparation system and nanometer array preparation method
Author	徐少林; 黄佳旭 ; 徐康
First Inventor	徐少林
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202111367350.8
Application Date	2021-11-18
Open (Notice) Number	CN114221208A
Date Available	2022-03-22
Status of Patent	实质审查
Legal Date	2022-04-08
Subtype	发明申请
SUSTech Authorship	First
Abstract	本发明公开了一种纳米阵列制备系统及纳米阵列制备方法。其中，纳米阵列制备系统包括：激光器，用于生成激光，并用于在基板的第一路径辐照生成第一纳米阵列；控制器，与激光器连接；位移台，用于承载基板；其中，激光器包括光束整形模块，光束整形模块用于生成平顶线聚焦光束；控制器还用于控制位移台移动预设距离，以使激光在基板的第二路径辐照生成第二纳米阵列；其中第一纳米阵列与第二纳米阵列间呈现交错排布，并在连续扫描中生成类蜂窝状的二维纳米结构。本发明的纳米阵列制备方法能够实现纳米阵列的高效大面积制备。
Other Abstract	The invention discloses a nano array preparation system and a nano array preparation method. The nano array preparation system comprises a laser used for generating laser and generating a first nano array through irradiation on a first path of a substrate; the controller is connected with the laser; the displacement table is used for bearing the substrate; the laser comprises a light beam shaping module, and the light beam shaping module is used for generating a flat-topped line focusing light beam. The controller is further used for controlling the displacement table to move by a preset distance, so that the laser irradiates on a second path of the substrate to generate a second nano array; wherein the first nano array and the second nano array are arranged in a staggered manner, and a honeycomb-like two-dimensional nano structure is generated in continuous scanning. According to the preparation method of the nano array, high-efficiency and large-area preparation of the nano array can be realized.
CPC Classification Number	H01S5/0239 ; H01S5/02253 ; H01S5/02255
IPC Classification Number	H01S5/02253 ; H01S5/02255 ; H01S5/0239
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2022-04-08][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2021-11-18
Patent Agent	洪铭福
Agency	广州嘉权专利商标事务所有限公司
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/532783
Department	Department of Mechanical and Energy Engineering
Recommended Citation GB/T 7714	徐少林,黄佳旭,徐康. 纳米阵列制备系统及纳米阵列制备方法.

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