南方科技大学知识苑(SUSTech KC): 载物台

Title	载物台
Alternative Title	Object stage
Author	黄龙; 张刘晶; 张振生; 俞大鹏
First Inventor	黄龙
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518000 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518000 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518000 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202123442516.6
Application Date	2021-12-30
Open (Notice) Number	CN216772195U
Date Available	2022-06-17
Publication Years	2022-06-17
Status of Patent	授权
Legal Date	2022-06-17
Subtype	实用新型
SUSTech Authorship	First
Abstract	本实用新型适用于固定装置领域，提供了载物台，包括基板，以及设于基板上的载板和至少一个推压组件，基板开设有容置腔，载板位于容置腔内并用于承载光刻物，载板的厚度小于容置腔的深度，推压组件设于容置腔并位于载板的一侧；推压组件包括斜压块和紧固件，斜压块开设有上下贯通的滑槽，紧固件能够沿滑槽移动，紧固件能够穿过滑槽而将斜压块与基板连接，斜压块背离载板的表面为倾斜面，容置腔具有与倾斜面配合的引导面，在光刻物位于载板上时，斜压块能够抵压光刻物。本实用新型提供的载物台，能够解决现有光刻物受到上下夹紧所带来的磨损或破损的问题，且能够达到对光刻物的固定松紧可调的效果。
Other Abstract	The utility model is applicable to the field of fixing devices, and provides an objective table, which comprises a substrate, and a carrier plate and at least one pushing and pressing assembly which are arranged on the substrate, the substrate is provided with an accommodating cavity, the carrier plate is positioned in the accommodating cavity and is used for bearing a photoetching object, the thickness of the carrier plate is smaller than the depth of the accommodating cavity, and the pushing and pressing assembly is arranged in the accommodating cavity and is positioned on one side of the carrier plate; the pushing and pressing assembly comprises an inclined pressing block and a fastener, the inclined pressing block is provided with a vertically-through sliding groove, the fastener can move along the sliding groove, the fastener can penetrate through the sliding groove to connect the inclined pressing block with the substrate, the surface, away from the carrier plate, of the inclined pressing block is an inclined face, and the containing cavity is provided with a guide face matched with the inclined face. The inclined pressing block can abut against the photoetching object. The objective table provided by the utility model can solve the problem that the existing photoetching object is abraded or damaged due to vertical clamping, and can achieve the effect of adjusting the fixing tightness of the photoetching object.
IPC Classification Number	G03F7/20
INPADOC Legal Status	（+PATENT GRANT）[2022-06-17][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2021-12-30
Patent Agent	陈延侨
Agency	深圳中一联合知识产权代理有限公司
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/533326
Department	Institute for Quantum Science and Engineering 理学院_物理系
Recommended Citation GB/T 7714	黄龙,张刘晶,张振生,等. 载物台[P]. 2022-06-17.

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