南方科技大学知识苑(SUSTech KC): 集成光学测温传感芯片、光学测温传感设备及测温方法

Title	集成光学测温传感芯片、光学测温传感设备及测温方法
Alternative Title	Integrated optical temperature measurement sensing chip, optical temperature measurement sensing equipment and temperature measurement method
Author	赵前程
First Inventor	赵前程
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202111350163.9
Application Date	2021-11-15
Open (Notice) Number	CN114295248A
Date Available	2022-04-08
Status of Patent	实质审查
Legal Date	2022-04-26
Subtype	发明申请
SUSTech Authorship	First
Abstract	本发明公开了集成光学测温传感芯片、光学测温传感设备及测温方法，其中，集成光学测温传感芯片包括晶片基底，设置在晶片基底上的集成光路，所述集成光路包括一个闭环的集成光学谐振腔和一个开环的总线光波导，总线光波导与集成光学谐振腔之间形成耦合区。本发明基于两正交偏振模的谐振频率之差随着腔体温度的变化而改变的原理，通过PDH(Pound‑Drever‑Hall)锁频技术，将可调谐激光的频率锁定在集成光学谐振腔的一个偏振谐振频率上，将边带调制频率锁定在两个正交偏振模谐振频率之差上，实现了边带调制频率对两正交偏振模谐振频率之差的实时跟踪；通过监测边带调制频率的变化，实现了对集成光学谐振腔温度变化的精确测量。
Other Abstract	The invention discloses an integrated optical temperature measurement sensing chip, an optical temperature measurement sensing device and a temperature measurement method.The integrated optical temperature measurement sensing chip comprises a wafer substrate and an integrated optical path arranged on the wafer substrate, the integrated optical path comprises a closed-loop integrated optical resonant cavity and an open-loop bus optical waveguide, and the integrated optical resonant cavity is connected with the open-loop bus optical waveguide. A coupling area is formed between the bus optical waveguide and the integrated optical resonant cavity. Based on the principle that the difference between the resonant frequencies of two cross-polarization modes changes along with the change of the temperature of a cavity, the frequency of tunable laser is locked on one polarization resonant frequency of an integrated optical resonant cavity through the PDH (Pound-Drever-Hall) frequency locking technology, the sideband modulation frequency is locked on the difference between the resonant frequencies of the two cross-polarization modes, and the frequency of the tunable laser is locked on the other polarization resonant frequency of the integrated optical resonant cavity through the PDH (Pound-Drever-Hall) frequency locking technology. The real-time tracking of the sideband modulation frequency on the resonant frequency difference of the two cross-polarization modes is realized; by monitoring the change of sideband modulation frequency, the accurate measurement of the temperature change of the integrated optical resonant cavity is realized.
IPC Classification Number	G01K11/00 ; H01S5/0239 ; H01S5/0683
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2022-04-26][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2021-11-15
Patent Agent	徐凯凯
Agency	深圳市君胜知识产权代理事务所(普通合伙)
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/533959
Department	SUSTech Institute of Microelectronics
Recommended Citation GB/T 7714	赵前程. 集成光学测温传感芯片、光学测温传感设备及测温方法.

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