南方科技大学知识苑(SUSTech KC): 一种高通量扫描探针显微成像系统

Title	一种高通量扫描探针显微成像系统
Alternative Title	High-flux scanning probe microscopic imaging system
Author	黄博远; 李江宇
First Inventor	黄博远
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202110383710.7
Application Date	2021-04-09
Open (Notice) Number	CN112945960A
Date Available	2021-06-11
Status of Patent	实质审查 ; 一案双申
Legal Date	2021-07-02
Subtype	发明申请
SUSTech Authorship	First
Abstract	本发明公开了一种高通量扫描探针显微成像系统。一种高通量扫描探针显微成像系统，包括：依次连接的波形发生器和成像装置，成像装置包括控制器和检测操作部分；波形发生器用于产生激励信号，激励信号为至少两个子波形按预设拼接顺序合成的信号；检测操作部分，用于将激励信号施加至待测目标的多个像素点以获得每个像素点对应的测试结果信号；控制器与检测操作部分和控制器连接，用于将从波形发生器接收的激励信号传输至检测操作部分，并从检测操作部分接受对应的测试结果信号，并基于测试结果信号和拼接顺序生成待测目标的测试结果。达到了一次扫描获得多维物性测试结果数据，提高扫描效率，提升测试结果数据的分辨率的效果。
Other Abstract	The invention discloses a high-flux scanning probe microscopic imaging system. The high-throughput scanning probe microscopic imaging system comprises a waveform generator and an imaging device which are connected in sequence, and the imaging device comprises a controller and a detection operation part; the waveform generator is used for generating an excitation signal, and the excitation signal is a signal synthesized by at least two sub-waveforms according to a preset splicing sequence; the detection operation part is used for applying the excitation signal to a plurality of pixel points of the target to be detected so as to obtain a test result signal corresponding to each pixel point; and the controller is connected with the detection operation part and the controller, and is used for transmitting the excitation signal received from the waveform generator to the detection operation part, receiving a corresponding test result signal from the detection operation part, and generating a test result of the to-be-tested target based on the test result signal and the splicing sequence. The effects of obtaining the multi-dimensional physical property test result data through one-time scanning, improving the scanning efficiency and improving the resolution ratio of the test result data are achieved.
CPC Classification Number	G01N21/84
IPC Classification Number	G01N21/84
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2021-07-02][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	2
Priority date	2021-04-09
Patent Agent	潘登
Agency	北京品源专利代理有限公司
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/534536
Department	Department of Materials Science and Engineering
Recommended Citation GB/T 7714	黄博远,李江宇. 一种高通量扫描探针显微成像系统.

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