南方科技大学知识苑(SUSTech KC): 一种用于低维层状材料快速转移的多真空吸附孔位加热台

Title	一种用于低维层状材料快速转移的多真空吸附孔位加热台
Alternative Title	Multi-vacuum-adsorption-hole-site heating table for rapid transfer of low-dimensional layered materials
Author	林君浩; 赵尔鼎
First Inventor	林君浩
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518055 广东省深圳市南山区学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518055 广东省深圳市南山区学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518055 广东省深圳市南山区学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202111487492.8
Application Date	2021-12-07
Open (Notice) Number	CN114407482A
Date Available	2022-04-29
Status of Patent	实质审查 ; 一案双申
Legal Date	2022-05-20
Subtype	发明申请
SUSTech Authorship	First
Abstract	本发明提供了一种用于低维层状材料快速转移的多真空吸附孔位加热台。其构造为：在金属导热台上固定连接有陶瓷加热片，真空密封螺丝丝接于金属导热台上，抽气管与金属导热台相连接，在金属导热台的顶端设置有用于真空吸附固定样品的真空吸附孔，真空吸附孔与抽气管通过位于金属导热台内部的腔道相连通；真空吸附孔的数量大于1个。本发明对用于低维材料/二维材料样品制备和转移平台的加热台进行了多吸附孔的设计。本发明一次吸附多个有低维材料样品的衬底，可以实现一次放置多个不同样品的衬底来制备低维材料/二维材料异质结等器件和样品。本发明减少更换不同样品和其衬底的时间，在提高制样效率的同时降低了因更换衬底而造成实验失败的风险。
Other Abstract	The invention provides a multi-vacuum adsorption hole site heating table for quickly transferring a low-dimensional layered material. According to the structure, a ceramic heating piece is fixedly connected to a metal heat-conducting table, a vacuum sealing screw is screwed to the metal heat-conducting table, an exhaust pipe is connected with the metal heat-conducting table, and a vacuum adsorption hole used for adsorbing and fixing a sample in a vacuum mode is formed in the top end of the metal heat-conducting table; the vacuum adsorption hole is communicated with the exhaust pipe through a cavity channel positioned in the metal heat-conducting table; the number of the vacuum adsorption holes is larger than one. According to the invention, the design of multiple adsorption holes is carried out on a heating table for a low-dimensional material/two-dimensional material sample preparation and transfer platform. According to the invention, a plurality of substrates with low-dimensional material samples are adsorbed at one time, and the substrates of a plurality of different samples can be placed at one time to prepare devices and samples such as low-dimensional material/two-dimensional material heterojunctions. The time for replacing different samples and substrates thereof is shortened, and the risk of experiment failure caused by substrate replacement is reduced while the sample preparation efficiency is improved.
CPC Classification Number	B32B37/06
IPC Classification Number	B32B37/06
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2022-05-20][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	2
Priority date	2021-12-07
Patent Agent	林松涛
Agency	广东金泰智汇专利商标代理事务所(普通合伙)
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/534550
Department	Department of Physics
Recommended Citation GB/T 7714	林君浩,赵尔鼎. 一种用于低维层状材料快速转移的多真空吸附孔位加热台.

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