南方科技大学知识苑(SUSTech KC): 一种超导探测单元、超导探测器及超导探测系统

Title	一种超导探测单元、超导探测器及超导探测系统
Alternative Title	Superconducting detection unit, superconducting detector and superconducting detection system
Author	王钊; 郭伟杰 ; 俞大鹏
First Inventor	王钊
Original applicant	南方科技大学
First applicant	南方科技大学
Address of First applicant	518000 广东省深圳市南山区西丽学苑大道1088号
Current applicant	南方科技大学
Address of Current applicant	518000 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
First Current Applicant	南方科技大学
Address of First Current Applicant	518000 广东省深圳市南山区西丽学苑大道1088号 (广东,深圳,南山区)
Application Number	CN202211048508.X
Application Date	2022-08-29
Open (Notice) Number	CN115389032A
Date Available	2022-11-25
Status of Patent	实质审查
Legal Date	2022-12-13
Subtype	发明申请
SUSTech Authorship	First
Abstract	本申请公开一种超导探测单元、超导探测器及超导探测系统，涉及超导探测的技术领域。该超导探测单元，包括电感、第一电容和衬底。电感用于接收待探测光信号，产生电信号；第一电容包括第一电极、第二电极；衬底上设置有凹槽，在衬底设置有凹槽的表面设置有第二电极，第二电极在凹槽处向下凹陷，第二电极覆盖在凹槽的内表面，第二电极上设置有电介质层，电介质层上覆盖有第一电极，第一电极和第二电极分别与电感连接，电感位于衬底的上表面。由于将第一电容设置在凹槽内，使第一电容在衬底上占据的面积更小，降低了单个超导探测单元的面积，在同样面积的超导探测器阵列中，能布置更多的超导探测单元，提高了超导探测的分辨率，从而提高成像分辨率。
Other Abstract	The invention discloses a superconducting detection unit, a superconducting detector and a superconducting detection system, and relates to the technical field of superconducting detection. The superconducting detection unit comprises an inductor, a first capacitor and a substrate. The inductor is used for receiving a to-be-detected optical signal and generating an electric signal; the first capacitor comprises a first electrode and a second electrode; a groove is formed in the substrate, a second electrode is arranged on the surface, provided with the groove, of the substrate, the second electrode is sunken downwards in the groove, the second electrode covers the inner surface of the groove, a dielectric layer is arranged on the second electrode, a first electrode covers the dielectric layer, and the first electrode and the second electrode are connected with an inductor. The inductor is located on the upper surface of the substrate. As the first capacitor is arranged in the groove, the area occupied by the first capacitor on the substrate is smaller, the area of a single superconducting detection unit is reduced, more superconducting detection units can be arranged in a superconducting detector array with the same area, the resolution of superconducting detection is improved, and the imaging resolution is improved.
IPC Classification Number	G01J11/00
INPADOC Legal Status	（ENTRY INTO FORCE OF REQUEST FOR SUBSTANTIVE EXAMINATION）[2022-12-13][CN]
INPADOC Patent Family Count	1
Extended Patent Family Count	1
Priority date	2022-08-29
Patent Agent	赵兴
Agency	北京超凡宏宇专利代理事务所(特殊普通合伙)
URL	[Source Record]
Data Source	PatSnap
Document Type	Patent
Identifier	http://kc.sustech.edu.cn/handle/2SGJ60CL/534555
Department	Institute for Quantum Science and Engineering 理学院_物理系
Recommended Citation GB/T 7714	王钊,郭伟杰,俞大鹏. 一种超导探测单元、超导探测器及超导探测系统.

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