Title | Removal of silicon-containing contaminants from TEM specimens |
Author | |
Corresponding Author | He, Dong Sheng |
Publication Years | 2023-11-01
|
DOI | |
Source Title | |
ISSN | 0304-3991
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EISSN | 1879-2723
|
Volume | 253 |
Abstract | Contaminant-free specimens are an essential prerequisite for high-quality electron microscopy. Silicon is the second most abundant element in the earth's crust with similar chemical properties to that of carbon. However, as a potential source of contamination, silicon has been occasionally reported but not specifically addressed in the electron microscopy community to date. This work highlights the widespread presence of silicon-containing contaminants on TEM specimens, and proposes a general solution for this type of contaminants by using SF6 as a silicon remover. After the treatment, both hydrocarbons and silicon-containing contaminants were removed and no further electron beam showering was needed for most of the specimens to achieve time-invariant imaging. It is expected that this method could be beneficial not only for electron microscopes but also for other surfacesensitive analytical instruments. |
Keywords | |
URL | [Source Record] |
Indexed By | |
Language | English
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SUSTech Authorship | First
; Corresponding
|
Funding Project | Science and Technology Innovation Com- mittee Foundation of Shenzhen[JCYJ20190809142019365]
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WOS Research Area | Microscopy
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WOS Subject | Microscopy
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WOS Accession No | WOS:001060308200001
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Publisher | |
ESI Research Field | CHEMISTRY
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Data Source | Web of Science
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Citation statistics |
Cited Times [WOS]:1
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Document Type | Journal Article |
Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/559331 |
Department | Public Testing and Analysis Center |
Affiliation | Southern Univ Sci & Technol, Core Res Facil, 1088, XueYuan Rd, Shenzhen 518055, Guangdong, Peoples R China |
First Author Affilication | Public Testing and Analysis Center |
Corresponding Author Affilication | Public Testing and Analysis Center |
First Author's First Affilication | Public Testing and Analysis Center |
Recommended Citation GB/T 7714 |
He, Dong Sheng. Removal of silicon-containing contaminants from TEM specimens[J]. ULTRAMICROSCOPY,2023,253.
|
APA |
He, Dong Sheng.(2023).Removal of silicon-containing contaminants from TEM specimens.ULTRAMICROSCOPY,253.
|
MLA |
He, Dong Sheng."Removal of silicon-containing contaminants from TEM specimens".ULTRAMICROSCOPY 253(2023).
|
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