中文版 | English
Title

Removal of silicon-containing contaminants from TEM specimens

Author
Corresponding AuthorHe, Dong Sheng
Publication Years
2023-11-01
DOI
Source Title
ISSN
0304-3991
EISSN
1879-2723
Volume253
Abstract
Contaminant-free specimens are an essential prerequisite for high-quality electron microscopy. Silicon is the second most abundant element in the earth's crust with similar chemical properties to that of carbon. However, as a potential source of contamination, silicon has been occasionally reported but not specifically addressed in the electron microscopy community to date. This work highlights the widespread presence of silicon-containing contaminants on TEM specimens, and proposes a general solution for this type of contaminants by using SF6 as a silicon remover. After the treatment, both hydrocarbons and silicon-containing contaminants were removed and no further electron beam showering was needed for most of the specimens to achieve time-invariant imaging. It is expected that this method could be beneficial not only for electron microscopes but also for other surfacesensitive analytical instruments.
Keywords
URL[Source Record]
Indexed By
Language
English
SUSTech Authorship
First ; Corresponding
Funding Project
Science and Technology Innovation Com- mittee Foundation of Shenzhen[JCYJ20190809142019365]
WOS Research Area
Microscopy
WOS Subject
Microscopy
WOS Accession No
WOS:001060308200001
Publisher
ESI Research Field
CHEMISTRY
Data Source
Web of Science
Citation statistics
Cited Times [WOS]:1
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/559331
DepartmentPublic Testing and Analysis Center
Affiliation
Southern Univ Sci & Technol, Core Res Facil, 1088, XueYuan Rd, Shenzhen 518055, Guangdong, Peoples R China
First Author AffilicationPublic Testing and Analysis Center
Corresponding Author AffilicationPublic Testing and Analysis Center
First Author's First AffilicationPublic Testing and Analysis Center
Recommended Citation
GB/T 7714
He, Dong Sheng. Removal of silicon-containing contaminants from TEM specimens[J]. ULTRAMICROSCOPY,2023,253.
APA
He, Dong Sheng.(2023).Removal of silicon-containing contaminants from TEM specimens.ULTRAMICROSCOPY,253.
MLA
He, Dong Sheng."Removal of silicon-containing contaminants from TEM specimens".ULTRAMICROSCOPY 253(2023).
Files in This Item:
There are no files associated with this item.
Related Services
Fulltext link
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Export to Excel
Export to Csv
Altmetrics Score
Google Scholar
Similar articles in Google Scholar
[He, Dong Sheng]'s Articles
Baidu Scholar
Similar articles in Baidu Scholar
[He, Dong Sheng]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[He, Dong Sheng]'s Articles
Terms of Use
No data!
Social Bookmark/Share
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.