High-Sensitivity Graphene MOEMS Resonant Pressure Sensor

Liu，Yujian1; Li，Cheng1,2; Shi，Xiaodong3; Wu，Zhengwei4; Fan，Shangchun1; Wan，Zhen1; Han，Song5

2023-06-28

10.1021/acsami.3c04520

ACS Applied Materials and Interfaces   Impact Factor & Quartile

1944-8244

1944-8252

Nanomechanical resonators made from suspended graphene exhibit high sensitivity toward pressure variations. Nevertheless, these devices exhibit significant energy loss in nonvacuum environments due to air damping, as well as inevitably weak gas leakage within the reference cavity because of the slight permeation of graphene. We present a new type of graphene resonant pressure sensor utilizing micro-opto-electro-mechanical systems technology, which features a multilayer graphene membrane that is sealed in vacuum and adhered to pressure-sensitive silicon film with grooves. This approach innovatively employs an indirectly sensitive method, exhibiting 60 times smaller energy loss in atmosphere, and solving the long-standing issue of gas permeation between the substrate and graphene. Notably, the proposed sensor exhibits a high pressure sensitivity of 1.7 Hz/Pa, which is 5 times higher than the sensitivity of the silicon counterparts. Also, the all-optical encapsulating cavity structure contributes a high signal-to-noise ratio of 6.9 × 10 Pa and a low temperature drift (0.014%/C). The proposed method offers a promising solution for long-term stability and energy loss suppression of pressure sensors using two-dimensional materials as the sensitive membrane.

graphene MOEMS pressure sensing resonators vacuum sealing

SCI

English

Others

National Natural Science Foundation[62173021] ; Beijing Natural Science Foundation[4212039] ; Aviation Science Foundation of China[2020Z073051002] ; Science Technology and Innovation Commission of Shenzhen Municipality["JCYJ20180504165721952","JCYJ20200109141201714"]

Science & Technology - Other Topics ; Materials Science

Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary

WOS:001038534500001

AMER CHEMICAL SOC

2-s2.0-85163723761

Scopus

1.School of Instrumentation and Optoelectronic Engineering,Beihang University,Beijing,100191,China
2.Shenzhen Institute of Beihang University,Shenzhen,518063,China
3.Institute of Materials Research and Engineering,Agency for Science,Technology and Research (ASTAR),138634,Singapore
4.Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,100190,China
5.School of Innovation and Entrepreneurship,Southern University of Science and Technology,Shenzhen,518055,China

Liu，Yujian,Li，Cheng,Shi，Xiaodong,et al. High-Sensitivity Graphene MOEMS Resonant Pressure Sensor[J]. ACS Applied Materials and Interfaces,2023,15(25):30479-30485.

Liu，Yujian.,Li，Cheng.,Shi，Xiaodong.,Wu，Zhengwei.,Fan，Shangchun.,...&Han，Song.(2023).High-Sensitivity Graphene MOEMS Resonant Pressure Sensor.ACS Applied Materials and Interfaces,15(25),30479-30485.

Liu，Yujian,et al."High-Sensitivity Graphene MOEMS Resonant Pressure Sensor".ACS Applied Materials and Interfaces 15.25(2023):30479-30485.