中文版 | English
Title

Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications

Author
Corresponding AuthorTan,Feihu; Chen,Yupeng; Yu,Hongyu
Publication Years
2023
DOI
Source Title
ISSN
0002-7820
EISSN
1551-2916
Abstract
In this study, nine component points were designed based on a CaO-BO-SiO (CBS) glass system with a high boron content, and CBS glass/AlO composites were developed for low-temperature co-fired ceramic (LTCC) applications. Furthermore, the densification process, phase compositions, microstructures, and properties were investigated. The results indicated that the softening of glass and interfacial reaction between the glass and AlO were the two most important factors affecting LTCC's densification process. The real-time shrinkage rate of LTCC during sintering was simulated using the thermal shrinkage curve and combined with DTA and X-ray diffraction. It was proven that the formation of the CaAl(BO)O phase contributed to the reduction in glass viscosity and promoted the formation of a dense structure. The LTCC composite with 30 vol% glass sintered at 850°C exhibited a coefficient of thermal expansion of 4.55–6.35 ppm/◦C, ε of 3.5–5.0, and a minimum tan δ of 0.0018 at 15 GHz. Therefore, these properties make the CBS–LTCC more suitable for high-frequency applications.
Keywords
URL[Source Record]
Indexed By
Language
English
SUSTech Authorship
First ; Corresponding
Funding Project
Shenzhen Municipal Council of Science and Innovation["JCYJ20200109141233476","JCYJ20210324120409025","HZQB-KCZYZ-2021052"] ; Shccig-Qinling Program and Sustech-sci Joint Laboratory[LHSYS0323001]
WOS Research Area
Materials Science
WOS Subject
Materials Science, Ceramics
WOS Accession No
WOS:001063722300001
Publisher
ESI Research Field
MATERIALS SCIENCE
Scopus EID
2-s2.0-85170235628
Data Source
Scopus
Citation statistics
Cited Times [WOS]:0
Document TypeJournal Article
Identifierhttp://kc.sustech.edu.cn/handle/2SGJ60CL/560052
DepartmentSUSTech Institute of Microelectronics
Affiliation
1.School of Microelectronics,South University of Science and Technology,Shenzhen,China
2.Engineering Research Center of Integrated Circuits for Next-Generation Communications,Ministry of Education,Southern University of Science and Technology,Shenzhen,China
3.GaN Device Engineering Technology Research Center of Guangdong,Southern University of Science and Technology,Shenzhen,China
First Author AffilicationSUSTech Institute of Microelectronics
Corresponding Author AffilicationSUSTech Institute of Microelectronics;  Southern University of Science and Technology
First Author's First AffilicationSUSTech Institute of Microelectronics
Recommended Citation
GB/T 7714
Xiong,Zilong,Xue,Wenzhuo,Li,Mujun,等. Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications[J]. Journal of the American Ceramic Society,2023.
APA
Xiong,Zilong,Xue,Wenzhuo,Li,Mujun,Tan,Feihu,Chen,Yupeng,&Yu,Hongyu.(2023).Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications.Journal of the American Ceramic Society.
MLA
Xiong,Zilong,et al."Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications".Journal of the American Ceramic Society (2023).
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