Stack growth of wafer-scale van der Waals superconductor heterostructures

Zhou，Zhenjia1; Hou，Fuchen2,3; Huang，Xianlei1; Wang，Gang2,3; Fu，Zihao1; Liu，Weilin1; Yuan，Guowen1; Xi，Xiaoxiang1; Xu，Jie1; Lin，Junhao2,3; Gao，Libo1

2023

10.1038/s41586-023-06404-x

Nature   Impact Factor & Quartile

0028-0836

1476-4687

Two-dimensional (2D) van der Waals (vdW) heterostructures have attracted considerable attention in recent years. The most widely used method of fabrication is to stack mechanically exfoliated micrometre-sized flakes, but this process is not scalable for practical applications. Despite thousands of 2D materials being created, using various stacking combinations, hardly any large 2D superconductors can be stacked intact into vdW heterostructures, greatly restricting the applications for such devices. Here we report a high-to-low temperature strategy for controllably growing stacks of multiple-layered vdW superconductor heterostructure (vdWSH) films at a wafer scale. The number of layers of 2D superconductors in the vdWSHs can be precisely controlled, and we have successfully grown 27 double-block, 15 triple-block, 5 four-block and 3 five-block vdWSH films (where one block represents one 2D material). Morphological, spectroscopic and atomic-scale structural analyses reveal the presence of parallel, clean and atomically sharp vdW interfaces on a large scale, with very little contamination between neighbouring layers. The intact vdW interfaces allow us to achieve proximity-induced superconductivity and superconducting Josephson junctions on a centimetre scale. Our process for making multiple-layered vdWSHs can easily be generalized to other situations involving 2D materials, potentially accelerating the design of next-generation functional devices and applications.

SCI

English

NI Journal Papers

Corresponding

National Key Ramp;amp;D Program of China["11904163","11974156","12104218","020414380201"] ; Natural Science Foundation of China["020414380176","BK20190010"] ; Fundamental Research Funds for the Central Universities[171038] ; Natural Science Foundation of Jiangsu Province[BX2021120] ; Fok Ying-Tong Education Foundation of China[2019ZT08C044] ; China National Postdoctoral Program for Innovative Talents[KQTD20190929173815000] ; Guangdong Innovative and Entrepreneurial Research Team Program["20200925161102001","ZDSYS20190902092905285"] ; null[2018YFA0305800]

Science & Technology - Other Topics

Multidisciplinary Sciences

WOS:001063267900004

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BIOLOGY & BIOCHEMISTRY;CLINICAL MEDICINE;MULTIDISCIPLINARY;PLANT & ANIMAL SCIENCE;ENVIRONMENT/ECOLOGY;SOCIAL SCIENCES, GENERAL;MICROBIOLOGY;ECONOMICS BUSINESS;IMMUNOLOGY;MATERIALS SCIENCE;COMPUTER SCIENCE;SPACE SCIENCE;MOLECULAR BIOLOGY & GENETICS;CHEMISTRY;NEUROSCIENCE & BEHAVIOR;PHYSICS;GEOSCIENCES;ENGINEERING

2-s2.0-85170060223

Scopus

1.National Laboratory of Solid State Microstructures,Jiangsu Key Laboratory for Nanotechnology,School of Physics,Collaborative Innovation Center of Advanced Microstructures,Nanjing University,Nanjing,China
2.Department of Physics and Shenzhen Key Laboratory of Advanced Quantum Functional Materials and Devices,Southern University of Science and Technology,Shenzhen,China
3.Quantum Science Center of Guangdong–Hong Kong–Macao Greater Bay Area (Guangdong),Shenzhen,China

Zhou，Zhenjia,Hou，Fuchen,Huang，Xianlei,et al. Stack growth of wafer-scale van der Waals superconductor heterostructures[J]. Nature,2023.

Zhou，Zhenjia.,Hou，Fuchen.,Huang，Xianlei.,Wang，Gang.,Fu，Zihao.,...&Gao，Libo.(2023).Stack growth of wafer-scale van der Waals superconductor heterostructures.Nature.

Zhou，Zhenjia,et al."Stack growth of wafer-scale van der Waals superconductor heterostructures".Nature (2023).