Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing
The fabrication of flexible pressure sensors with low cost, high scalability, and easy fabrication is an essential driving force in developing flexible electronics, especially for high-performance sensors that require precise surface microstructures. However, optimizing complex fabrication processes and expensive microfabrication methods remains a significant challenge. In this study, we introduce a laser pyrolysis direct writing technology that enables rapid and efficient fabrication of high-performance flexible pressure sensors with a micro-truncated pyramid array. The pressure sensor demonstrates exceptional sensitivities, with the values of 3132.0, 322.5, and 27.8 kPa in the pressure ranges of 0-0.5, 0.5-3.5, and 3.5-10 kPa, respectively. Furthermore, the sensor exhibits rapid response times (loading: 22 ms, unloading: 18 ms) and exceptional reliability, enduring over 3000 pressure loading and unloading cycles. Moreover, the pressure sensor can be easily integrated into a sensor array for spatial pressure distribution detection. The laser pyrolysis direct writing technology introduced in this study presents a highly efficient and promising approach to designing and fabricating high-performance flexible pressure sensors utilizing micro-structured polymer substrates.
National Key Ramp;D Program of China[2018YFE0204600] ; Shenzhen Fundamental Research Program[JCYJ20200109140822796] ; Special Funds for the Cultivation of Guandong College Students' Scientific and Technological Innovation[pdjh 2022c0080]
|WOS Research Area|
Science & Technology - Other Topics ; Materials Science
Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
|WOS Accession No|
Cited Times [WOS]:1
|Document Type||Journal Article|
|Department||SUSTech Institute of Microelectronics|
1.Faculty of EEMCS,Delft University of Technology,Delft,Mekelweg 4,2628 CD,Netherlands
2.School of Microelectronics,Southern University of Science and Technology,Shenzhen,518055,China
|First Author Affilication||SUSTech Institute of Microelectronics|
|Corresponding Author Affilication||SUSTech Institute of Microelectronics|
Wang，Shaogang,Zong，Qihang,Yang，Huiru,et al. Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing[J]. ACS Applied Materials and Interfaces,2023.
Wang，Shaogang.,Zong，Qihang.,Yang，Huiru.,Tan，Chunjian.,Huang，Qianming.,...&Ye，Huaiyu.(2023).Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing.ACS Applied Materials and Interfaces.
Wang，Shaogang,et al."Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing".ACS Applied Materials and Interfaces (2023).
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