| Title | High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps |
| Author | |
| Publication Years | 2023
|
| DOI | |
| Source Title | |
| ISSN | 1558-0563
|
| Volume | PPIssue:99Pages:1-1 |
| Keywords | |
| URL | [Source Record] |
| SUSTech Authorship | First
|
| ESI Research Field | ENGINEERING
|
| Data Source | IEEE
|
| PDF url | https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10287376 |
| Citation statistics | |
| Document Type | Journal Article |
| Identifier | http://kc.sustech.edu.cn/handle/2SGJ60CL/582731 |
| Department | SUSTech Institute of Microelectronics |
| Affiliation | 1.School of Microelectronics, Southern University of Science and Technology, Shenzhen, China 2.Foshan Electrical and Lighting Company, Ltd, Foshan, China |
| First Author Affilication | SUSTech Institute of Microelectronics |
| First Author's First Affilication | SUSTech Institute of Microelectronics |
| Recommended Citation GB/T 7714 |
Jiahao Yin,Yumeng Luo,Liang Chen,et al. High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps[J]. IEEE Electron Device Letters,2023,PP(99):1-1.
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| APA |
Jiahao Yin,Yumeng Luo,Liang Chen,Qing Wang,Hongyu Yu,&Kwai Hei Li.(2023).High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps.IEEE Electron Device Letters,PP(99),1-1.
|
| MLA |
Jiahao Yin,et al."High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps".IEEE Electron Device Letters PP.99(2023):1-1.
|
| Files in This Item: | There are no files associated with this item. | |||||
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